A RuO2 micro-supercapacitor with a side-by-side electrode configuration structure was designed and fabricated. It was composed of the micro-structure, the micro-electrode, and the functional RuO2 film on the electrode. The micro-structure was made by the MEMS technology, while the micro-electrode was made by electroplating the functional RuO2 film on the surface of the current collector. The electrochemical test results showed that the micro-supercapacitor had the specific capacity of 0.012F · cm-2 and the energy density of 0.006J · cm-2. The performance of the RuO2-CNT (carbon nanotube) composite functional film was studied. The cyclic voltammetry (CV) and electrochemical impedance spectroscopy (EIS) curves showed that compared with the RuO2 film, the RuO2-CNT composite film greatly decreased the internal resistance, and improved the energy-storage density and the charge-CNT discharge quality of the micro-capacitor. Anyway, the micro-capacitor can satisfy the energy requirements of a lot of microsystems for its great stability and discharge power.%基于感应耦合等离子刻蚀等工艺设计制作了一种具有双腔室结构的微型氧化钌超级电容器,在其腔室微结构中基于电化学沉积方法制备了氧化钌微电极功能薄膜.直流充放电测试结果表明,该微型超级电容器的比容量达到0.012F·cm-2,储能密度达到0.006J·cm-2.进行了氧化钌/碳纳米管复合功能,薄膜微电极的性能研究,阻抗谱测试与伏安测试曲线表明,与氧化钌微电极功能薄膜相比,氧化钌/碳纳米管复合功能薄膜阻抗显著降低,容量明显提高,基于该复合功能薄膜的微型超级电容器的储能密度等关键性能指标可得到显著提高.
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