一种基于微纳米加工技术的新型太赫兹片上螺旋天线

摘要

给出了一种基于微纳米加工技术的3D片上天线结构,天线工作频率为1.5 THz.该天线结构包含圆柱形金属螺旋和衬底上的微带馈线2个部分.所提出的天线结构可以在单片晶圆上利用微纳米加工技术实现,且方便与系统其他部分的电路集成于同一芯片内部.天线在1.4 THz~1.6 THz频段内具有很高的增益(11 dBi)和很宽的工作带宽(200 GHz),非常适合应用于太赫兹通信系统.%In this work,a novel design for a fully on-chip 3D antenna operating at 1.5 THz that can be manufactured by micro/nano fabrication technology is presented.The structure of the antenna includes two parts,the metallic helix and the micro-strip on the substrate for feed.The proposed antenna structure is well suitable realized by micro/nano fabrication technology,the fabrication of the structure needs only one wafer,and the antenna can be easily integrated with other parts of on-chip circuits.The antenna is characterized by high gain(11 dBi)and wide bandwidth(200 GHz)in the 1.4 THz~1.6 THz frequency range,suitable for Terahertz communication systems.