Ultra-short-period W/B(4)C multilayers for X-ray optics-microstructure limits on reflectivity.

摘要

W/B{dollar}sb4{dollar}C multilayer thin films were fabricated by magnetron sputtering on Si(111) substrates for applications as linear polarizing optical elements for soft x-rays, with periods from 48A to as little as 4.7A. The x-ray reflectivity measured at {dollar}lambda{dollar} = 1.54A and at 45{dollar}spcirc{dollar} incidence {dollar}rm(14.4A