Study on Influence Factors to Workpiece Temperature in Multi-arc Ion Plating

摘要

Workpiece temperature is a very important influence factor to TiN film quality in multi-arc ion plating process. In order to predict the workpiece temperature in plating process,the influence factors to workpiece temperature was discussed from the aspect of energy. According to conservation of energy,an equation between workpiece temperature and bias voltage,current,workpiece gross,workpiece material,heater power,and emission ratio of thermal baffle was established. The equation was solved with Mathematica and Matlab software,and the variation of workpiece temperature at different operational parameters was obtained. The comparison results of calculated values and measured values showed that the equation could provide certain references for the selection of operational parameters in practical production process.