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Micromechanical properties of silicate glass films on sapphire substrates

机译:蓝宝石衬底上的硅酸盐玻璃膜的微机械性能

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摘要

The deformation of thin layers of glass on crystalline materials has been examined using newly developed experimental methods for nanomechanical testing. Continuous films of anorthite (CaAl_2Si_2O_8), celsian (BaAl_2Si_2O_8), and monticellite (CaMgSiO_4) were deposited onto Al_2O_3 surfaces by pulsed-laser deposition (PLD). Mechanical properties such as Yong's modulus and hardness were probed with a high-resolution depth-sensing indentation instrument. Nanomechanical testing, combined with AFM in-situ imaging of the deformed regions, allowed force-displacement measurements and imaging of the same regions of the specimen before and immediately after indentation. Emphasis has been placed on examining how changes in the glass composition, residual stress introduced into the films, effect of film's heat-treatment, and the effect of substrate crystallographic orientation will affect the mechanical properties of silicate-glass films.
机译:使用新开发的用于纳米力学测试的实验方法,已经检查了晶体材料上的玻璃薄层的变形。通过脉冲激光沉积(PLD)将钙长石(CaAl_2Si_2O_8),硅藻土(BaAl_2Si_2O_8)和蒙脱石(CaMgSiO_4)的连续膜沉积在Al_2O_3表面上。用高分辨率的深度感应压痕仪探测诸如杨氏模量和硬度的机械性能。纳米力学测试与变形区域的AFM原位成像相结合,可以在压痕之前和之后立即进行力位移测量以及对样品相同区域的成像。重点放在检查玻璃成分的变化,引入膜中的残余应力,膜的热处理效果以及基底晶体学取向的影响如何影响硅酸盐-玻璃膜的机械性能。

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