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Micromechanical properties of silicate glass films on sapphire substrates

机译:蓝宝石衬底上硅酸盐玻璃膜的微机械性能

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The deformation of thin layers of glass on crystalline materials has been examined using newly developed experimental methods for nanomechanical testing. Continuous films of anorthite (CaAl_2Si_2O_8), celsian (BaAl_2Si_2O_8), and monticellite (CaMgSiO_4) were deposited onto Al_2O_3 surfaces by pulsed-laser deposition (PLD). Mechanical properties such as Yong's modulus and hardness were probed with a high-resolution depth-sensing indentation instrument. Nanomechanical testing, combined with AFM in-situ imaging of the deformed regions, allowed force-displacement measurements and imaging of the same regions of the specimen before and immediately after indentation. Emphasis has been placed on examining how changes in the glass composition, residual stress introduced into the films, effect of film's heat-treatment, and the effect of substrate crystallographic orientation will affect the mechanical properties of silicate-glass films.
机译:采用新开发的纳米力学检测试验方法,研究了结晶材料上薄层薄层的变形。通过脉冲激光沉积(PLD)沉积在AL_2O_3表面上的钙铜(CAAL_2SI_2O_8),Celsian(BAAL_2SI_2O_8)和Monticellite(CAMGSIO_4)。用高分辨率深度传感凹口仪探测Yong的模量和硬度等机械性能。纳米力学测试,结合变形区域的AFM原位成像,在压痕之前和立即允许动力 - 位移测量和对样品的相同区域的成像。重点是在检查玻璃组合物中的变化,引入薄膜中的残余应力,薄膜的热处理的影响以及底物晶体取向的效果会影响硅酸盐 - 玻璃膜的机械性能。

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