Imprint process for optical device with periodic structure

摘要

Imprint process to form fine structures onto a glass surface was studied with the aim of developing several functions such as antireflection, dispersion correction and polarization control. The fabrication of SiC molds with high thermal durability and mechanical strength enabled us to imprint an antireflection structure with reflectivity of 1/20 that of the polished surface in the visible wavelength region. Furthermore, such technology was successfully applied to the fabrication of antireflection lens.