首页> 外国专利> Copying micro or nano-structures on optically transparent plastic surfaces, for optical purposes, imprints, nano-imprint lithography masters, or structure transfer in photoreactive system, uses curable casting resin with resist as original

Copying micro or nano-structures on optically transparent plastic surfaces, for optical purposes, imprints, nano-imprint lithography masters, or structure transfer in photoreactive system, uses curable casting resin with resist as original

机译:出于光学目的,压印,纳米压印光刻原版或光敏系统中的结构转移,在光学透明的塑料表面上复制微或纳米结构,使用具有抗蚀剂的可固化浇铸树脂作为原始材料

摘要

Method of copying micro- and nano-structures on surfaces of optically transparent plastics comprises using preferably lithographically-structurized resist layers as original and curable casting resin. The resultant moldings are used for optical applications and as masters for imprint lithography.
机译:在光学透明塑料的表面上复制微结构和纳米结构的方法包括优选使用光刻结构化的抗蚀剂层作为原始的可固化的浇铸树脂。所得模制品用于光学应用,并用作压印光刻的母版。

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