METHOD FOR FORMING PERIODIC STRUCTURE, PERIODIC STRUCTURE, AND OPTICAL ELEMENT USING PERIODIC STRUCTURE

摘要

PROBLEM TO BE SOLVED: To easily produce a periodic structure having an inverse opal structure on a substrate, which periodic structure is used for a photonic crystal optical device, such as an optical wave guide path, an optical resonator utilizing a fine powder periodic structure having fine powder periodically arranged thereon and its inverse structure, and further is used for a display device, and a sensor.;SOLUTION: The periodic structure 3 by silica is formed on a quartz substrate 4. The periodic structure 3 side of the quartz substrate 4 is brought into contact with a polycarbonate substrate 1 so as to overlap both substrates. A monomeric photocuring resin 2 is poured between both substrates, and is cured by the polymerization by being irradiated with ultra-violet rays. Then, the silica and the substrate 4 are removed with a hydrofluoric acid. The photonic crystal usable for an optical device is manufactured by utilizing a fine powder film arranged by utilizing the self-organization. By this method, silica and polystyrene having excellent mono-dispersion are used as fine powder. In this case, a monomer, such as a photocuring resin, is poured into the spaces between fine powder of the fine powder film in order to produce the fine powder film having a high refractive index. After the monomer has been cured, the fine powder is removed by etching. Thus, the method for producing the periodic inverse structure made of polymer can be achieved. In addition, such a problem that the periodic structure manufactured by this method comes off from the substrate when the fine powder serving as original patterns has been removed, can be eliminated.;COPYRIGHT: (C)2006,JPO&NCIPI