University of Freiburg - IMTEK, Department of Microsystems Engineering, Laboratory for Design of Microsystems, Georges-Koehler-Allee 102, 79110 Freiburg, Germany;
University of Freiburg - IMTEK, Department of Microsystems Engineering, Laboratory for Design of Microsystems, Georges-Koehler-Allee 102, 79110 Freiburg, Germany;
University of Freiburg - IMTEK, Department of Microsystems Engineering, Laboratory for Design of Microsystems, Georges-Koehler-Allee 102, 79110 Freiburg, Germany;
University of Freiburg - IMTEK, Department of Microsystems Engineering, Laboratory for Design of Microsystems, Georges-Koehler-Allee 102, 79110 Freiburg, Germany;
机译:常压等离子体预处理,用于低温下硅晶片的直接键合
机译:低温中间Au-Si晶片键合;共晶或硅化物键
机译:低温中间AU-SI晶圆键合-共晶或硅键合
机译:低温晶片键合:等离子辅助硅直接粘接与硅金共晶键合
机译:采用金-硅共晶结合和局部加热的低温晶圆级真空包装
机译:低温晶片直接键合的电容式微机械超声换能器的制备与表征
机译:等离子体辅助Inp / al2O3 / sOI直接晶圆键合中亲水键合界面上的氧化物形成