SYNTHESIS OF TAILOR-MADE SINGLE SOURCE PRECURSORS FOR THE DEPOSITION OF BINARY GROUP 13-ANTIMONIDE THIN FILMS

摘要

The synthesis of heterocyclic stibinogallanes of the type [R_2MER'_2]x by use of a novel reaction pathway is described. As-prepared heterocycles may serve as single source precursors for the growth of GaSb films in HV-MOCVD processes at relatively low substrate temperatures (400 - 550 ℃). In contrast, Lewis acid-base adducts R3M- ER'_3 tend to GaSb whisker growth.