LOVE-WAVE ACOUSTIC SENSORS AND SILICON MICROCANTILEVERS: A COUPLED APPROACH TO CHARACTERIZE POLYMER THIN FILMS

摘要

The objective of this paper is to couple theoretical and experimental results from microcantilevers and Love-wave acoustic devices in order to identify and separate mass loading effects from elastic effects. This is important in the perspective of sensing applications. For that, a thin-film polymer is deposited on both resonant platforms. It is demonstrated that microcantilevers are essentially mass sensitive. They so allow to determine the polymer layer thickness, which is validated by optical profilometry measurements. Then, taking into account this thickness, theoretical modeling and experimental measurements with Love-wave devices permit to estimate an equivalent elastic shear modulus of the thin-film polymer at high frequency.