FABRICATION OF FINE PLASTIC MICROCHANNEL BY USING HOT EMBOSSING

摘要

Fine plastic micorchannels were fabricated by hot embossing of PMMA substrates. To realize rectangular cross sectional channel structure, silicon molds having ridge structures fabricated by Deep-RIE was employed. The hot embossing condition such as the temperature, applied pressure and time was also carefully optimized. The embossing technique was also applied for the fabrication of other plastic microchannels such as fluororesin.