Investigation on the Low Cost 2ωYLF Laser Crystallization Poly-silicon Technology

摘要

The 2ωYLF laser crystallization technology with a low cost has been investigated in this paper. We have designed and established a 2ωYLF laser crystallization system by ourselves. The YLF laser has been used as the laser source. Then, the influences of the 2ωYLF laser crystallization parameters on the performances of the resulted poly-Si have been studied. Based on the optimization of the 2ωYLF laser crystallization condition, the sequential lateral solidification (SLS) has been achieved. The grain size is several micron meters.