Abstract: Torsion micromirror devices have been widely used in many applications. This paper describes the modeling of a torsion beam micromirror based on the parallel plate capacitor model. First, a generalized and normalized equation that governs the static characteristics of the torsion micromirror device is derived. Henceforth the influence of the structural parameters of micromirror is discussed, and the snap-down effect and the capacitance variation of the micromirror are studied. Finally, a micromirror is designed and fabricated. However, the model has not yet been verified by experimental data as testing is in progress. !20
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