Modeling switching response of torsional micromirrors for optical microsystems

摘要

The paper proposes an improved model for the switching response of torsional micromirrors by including the effect of counter electrostatic field in addition to the main field. Further, it is also proposed to include a stopper electrode in order to obtain 90° tilting angle for optical switching applications. Results on the static and dynamic behavior of the micromirrors under different parametric conditions are presented which indicate that the scan angle can be increased with the introduction of the stopper electrode. Also presented are the results on pull-in-voltage, natural frequency and settling time for different stopper geometry.