Analysis, fabrication and performance measurement of tunable optical micromirror switches based on MEMS technology.

摘要

An optical switch using micromirror has been investigated. The need to convert the optical signal into electrical signal and back into optical signal in order to accomplish switching has been eliminated. The micromirrors available at the Center for Microtechnology have been reconfigured to obtain a simple stack of insulators. The spherical warping of the micromirrors induced by the layer stress is investigated. Changing the temperature leads to different stress values and controllable focal length. This behavior is utilized for tuning the switch. Experimental work on the determination of focal length as a function of temperature for several layer materials has been performed. Experimental work on controllable range focus length, imperfections and relaxation of the micromirrors with different layer coatings has also been done. The performance and suitability of these switches has been established through the comparison of theoretical and experimental results.