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Electron Devices Meeting, 2003. IEDM '03 Technical Digest. IEEE International
Electron Devices Meeting, 2003. IEDM '03 Technical Digest. IEEE International
召开年:
2003
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1.
Layer design for GaAs-based DHBTs enabling 28 V high-power microwave applications
机译:
基于GaAs的DHBT的层设计,可实现28 V大功率微波应用
作者:
Maassdorf A.
;
Kurpas P.
;
Doser W.
;
Brunner F.
;
Bergunde T.
;
Blanck H.
;
Wurfl J.
;
Weyers M.
;
Trankle G.
会议名称:
《Electron Devices Meeting, 2003. IEDM '03 Technical Digest. IEEE International》
|
2003年
关键词:
gallium arsenide;
III-V semiconductors;
gallium compounds;
indium compounds;
heterojunction bipolar transistors;
microwave bipolar transistors;
doping profiles;
heavily doped semiconductors;
current density;
semiconductor device measurement;
stability;
l;
2.
Locally strained ultra-thin channel 25nm narrow FDSOI devices with metal gate and mesa isolation
机译:
具有金属栅极和台面隔离功能的局部应变超薄通道25nm窄FDSOI器件
作者:
Krivokapic Z.
;
Moroz V.
;
Maszara W.
;
Lin M.-R.
会议名称:
《Electron Devices Meeting, 2003. IEDM '03 Technical Digest. IEEE International》
|
2003年
关键词:
MOSFET;
silicon-on-insulator;
carrier mobility;
semiconductor device models;
locally strained FDSOI devices;
ultra-thin channel narrow FDSOI devices;
metal gate mesa isolation;
strained silicon devices;
carrier mobility;
SOI substrate;
short-channel cont;
3.
Low voltage, scalable nanocrystal flash memory fabricated by templated self assembly
机译:
通过模板自组装制造的低压可扩展纳米晶体闪存
作者:
Guarini K.W.
;
Black C.T.
;
Zhang Y.
;
Babich I.V.
;
Sikorski E.M.
;
Gignac L.M.
会议名称:
《Electron Devices Meeting, 2003. IEDM '03 Technical Digest. IEEE International》
|
2003年
关键词:
flash memories;
nanoelectronics;
nanostructured materials;
self-assembly;
polymer films;
low-power electronics;
integrated circuit reliability;
low voltage scalable nanocrystal flash memory;
templated self assembly;
nanocrystal flash memory devices;
nano;
4.
Low-pressure CMP for 300-mm ultra low-k (k=1.6-1.8)/Cu integration
机译:
用于300mm超低k(k = 1.6-1.8)/ Cu集成的低压CMP
作者:
Kondo S.
;
Yoon B.U.
;
Tokitoh S.
;
Misawa K.
;
Sone S.
;
Shin H.J.
;
Ohashi N.
;
Kobayashi N.
会议名称:
《Electron Devices Meeting, 2003. IEDM '03 Technical Digest. IEEE International》
|
2003年
关键词:
integrated circuit interconnections;
dielectric thin films;
mechanical strength;
porous materials;
chemical mechanical polishing;
polymer films;
copper;
ultra low-k dielectrics;
mechanical strength;
porous methyl silsesquioxane;
inter-line dielectrics;
l;
5.
Modeling metal dishing for interconnect optimization
机译:
建模金属凹陷以优化互连
作者:
Runzi Chang
;
Yu Cao
;
Spanos C.J.
会议名称:
《Electron Devices Meeting, 2003. IEDM '03 Technical Digest. IEEE International》
|
2003年
关键词:
integrated circuit interconnections;
integrated circuit design;
integrated circuit metallisation;
integrated circuit modelling;
circuit optimisation;
semiconductor process modelling;
metal dishing modeling;
interconnect optimization;
damascene process;
p;
6.
Monolithic vertical integration of Si/SiGe HBT and Si-based resonant interband tunneling diode demonstrating latching operation and adjustable peak-to-valley current ratios
机译:
Si / SiGe HBT和基于Si的谐振带间隧穿二极管的单片垂直集成展示了锁存操作和可调节的峰谷电流比
作者:
Sung-Yong Chung
;
Niu Jin
;
Ronghua Yu
;
Berger P.R.
;
Thompson P.E.
;
Lake R.
;
Rommel S.L.
;
Kurinec S.K.
会议名称:
《Electron Devices Meeting, 2003. IEDM '03 Technical Digest. IEEE International》
|
2003年
关键词:
heterojunction bipolar transistors;
resonant tunnelling diodes;
silicon;
elemental semiconductors;
Ge-Si alloys;
semiconductor materials;
quantum theory;
semiconductor device measurement;
RITD-HBT structure latching operation;
monolithic vertical integra;
7.
MRAM with lamellar structure as free layer
机译:
具有层状结构的MRAM作为自由层
作者:
Baek I.G.
;
Lee J.E.
;
Kim H.-J.
;
Ha Y.K.
;
Bae J.S.
;
Oh S.C.
;
Park S.O.
;
Chung U.-I.
;
Lee N.I.
;
Kang H.K.
;
Moon J.T.
会议名称:
《Electron Devices Meeting, 2003. IEDM '03 Technical Digest. IEEE International》
|
2003年
关键词:
magnetic storage;
random-access storage;
magnetic tunnelling;
magnetic random access memory;
magnetic tunnel junction;
switching field distribution;
high density MRAM;
reliable operating margin;
MTJ film roughness control;
free layer materials;
cell shap;
8.
Narrow-channel-MOSFET having Si-dots for high-rate generation of random numbers
机译:
具有硅点的窄通道MOSFET,可高速生成随机数
作者:
Ohba R.
;
Yasuda S.
;
Tanamoto T.
;
Uchida K.
;
Fujita S.
会议名称:
《Electron Devices Meeting, 2003. IEDM '03 Technical Digest. IEEE International》
|
2003年
关键词:
random number generation;
noise generators;
semiconductor quantum dots;
MOSFET;
silicon;
elemental semiconductors;
random number generator;
RNG;
narrow-channel-MOSFET;
high-rate random number generation;
noise source device;
Si multi-dots;
network securi;
9.
NBTI impact on transistor and circuit: models, mechanisms and scaling effects MOSFETs
机译:
NBTI对晶体管和电路的影响:模型,机制和缩放效应MOSFETs
作者:
Krishnan A.T.
;
Reddy V.
;
Chakravarthi S.
;
Rodriguez J.
;
John S.
;
Krishnan S.
会议名称:
《Electron Devices Meeting, 2003. IEDM '03 Technical Digest. IEEE International》
|
2003年
关键词:
MOSFET;
semiconductor device models;
thermal stability;
carrier mobility;
C/sub GD/ degradation;
negative bias temperature instability;
scaling effects;
NBTI;
mobility degradation;
gate-drain capacitance degradation;
digital circuits;
analog circuits;
op;
10.
New compact model for induced gate current noise MOSFET
机译:
用于感应栅极电流噪声的新型紧凑模型MOSFET
作者:
van Langevelde R.
;
Paasschens J.C.J.
;
Scholten A.J.
;
Havens R.J.
;
Tiemeijer L.F.
;
Klaassen D.B.M.
会议名称:
《Electron Devices Meeting, 2003. IEDM '03 Technical Digest. IEEE International》
|
2003年
关键词:
MOSFET;
semiconductor device models;
semiconductor device noise;
MOSFET compact model;
induced gate current noise;
RF CMOS circuit design;
short-channel devices;
Klaassen-Prins method;
velocity saturation;
11.
New method for temperature-dependent thermal resistance and capacitance accurate extraction in high-voltage DMOS transistors
机译:
高压DMOS晶体管中与温度有关的热阻和电容精确提取的新方法
作者:
Anghel C.
;
Hefyene N.
;
Gillon R.
;
Tack M.
;
Declercq M.J.
;
Ionescu A.M.
会议名称:
《Electron Devices Meeting, 2003. IEDM '03 Technical Digest. IEEE International》
|
2003年
关键词:
power MOSFET;
thermal resistance;
specific heat;
semiconductor device measurement;
semiconductor device models;
temperature-dependent thermal resistance;
thermal capacitance extraction;
high-voltage DMOS transistors;
self-heating-effect;
SHE;
DMOSFET;
eq;
12.
New non-volatile memory with extremely high density metal nano-dots
机译:
具有超高密度金属纳米点的新型非易失性存储器
作者:
Takata M.
;
Kondoh S.
;
Sakaguchi T.
;
Choi H.
;
Shim J.-C.
;
Kurino H.
;
Koyanagi M.
会议名称:
《Electron Devices Meeting, 2003. IEDM '03 Technical Digest. IEEE International》
|
2003年
关键词:
MOS memory circuits;
nanoelectronics;
nanostructured materials;
sputter deposition;
integrated circuit metallisation;
quantum dots;
integrated circuit measurement;
nonvolatile memory;
extremely high density metal nano-dots;
MND memory;
MND film charge re;
13.
Nitrogen profile control by plasma nitridation technique for poly-Si gate HfSiON CMOSFET with excellent interface property and ultra-low leakage current
机译:
通过等离子氮化技术控制具有优异界面性能和超低漏电流的多晶硅栅极HfSiON CMOSFET的氮分布
作者:
Sekine K.
;
Inumiya S.
;
Sato M.
;
Kaneko A.
;
Eguchi K.
;
Tsunashima Y.
会议名称:
《Electron Devices Meeting, 2003. IEDM '03 Technical Digest. IEEE International》
|
2003年
关键词:
nitridation;
carrier mobility;
thermal stability;
plasma materials processing;
diffusion;
hafnium compounds;
silicon compounds;
dielectric thin films;
CMOS integrated circuits;
integrated circuit testing;
MOS capacitors;
MOSFET;
leakage currents;
nitroge;
14.
Noble FeRAM technologies with MTP cell structure and BLT ferroelectric capacitors
机译:
具有MTP单元结构和BLT铁电电容器的Noble FeRAM技术
作者:
Oh S.-H.
;
Hong S.-K.
;
Noh K.-H.
;
Kweon S.-Y.
;
Kim N.-K.
;
Yang Y.-H.
;
Kim J.-G.
;
Seong J.-Y.
;
Jang I.-W.
;
Park S.-H.
;
Bang K.-H.
;
Lee K.-N.
;
Jeong H.-J.
;
Son J.-H.
;
Lee S.-S.
;
Choi E.-S.
;
Sun H.-J.
;
Yeom S.-J.
;
Ban K.-D.
;
Park J.-W.
;
Park G.-D.
;
Song S.-Y.
;
Shin J.-H.
;
Lee S.-I.
;
Park Y.-J.
会议名称:
《Electron Devices Meeting, 2003. IEDM '03 Technical Digest. IEEE International》
|
2003年
关键词:
ferroelectric storage;
bismuth compounds;
lanthanum compounds;
ferroelectric capacitors;
random-access storage;
merged top electrode/plate line structure;
BLT stacked capacitor;
ferroelectric memory;
1TIC FeRAM;
MTP cell structure;
BLT ferroelectric capa;
15.
Novel cell structure of PRAM with thin metal layer inserted GeSbTe
机译:
插入有金属薄层的GeSbTe PRAM的新型单元结构
作者:
Yi J.H.
;
Ha Y.H.
;
Park J.H.
;
Kuh B.J.
;
Horii H.
;
Kim Y.T.
;
Park S.O.
;
Hwang Y.N.
;
Lee S.H.
;
Ahn S.J.
;
Lee S.Y.
;
Hong J.S.
;
Lee K.H.
;
Lee N.I.
;
Kang H.K.
;
U-In Chung
;
Moon J.T.
会议名称:
《Electron Devices Meeting, 2003. IEDM '03 Technical Digest. IEEE International》
|
2003年
关键词:
random-access storage;
germanium compounds;
titanium compounds;
solid-state phase transformations;
crystallisation;
amorphisation;
phase-change random access memory;
phase-change RAM;
PRAM cell structure;
thin metal layer inserted GeSbTe;
metal interlaye;
16.
Novel self-assembled ultra-low-k porous silica films with high mechanical strength for 45 nm BEOL technology
机译:
用于45 nm BEOL技术的具有高机械强度的新型自组装超低k多孔二氧化硅薄膜
作者:
Oku Y.
;
Yamada K.
;
Goto T.
;
Seino Y.
;
Ishikawa A.
;
Ogatal T.
;
Kohmura K.
;
Fujii N.
;
Hata N.
;
Ichikawa R.
;
Yoshino T.
;
Negoro C.
;
Nakano A.
;
Sonoda Y.
;
Takada S.
;
Miyoshi H.
;
Oike S.
;
Tanaka H.
;
Matsuo H.
;
Kinoshita K.
;
Kikkawa T.
会议名称:
《Electron Devices Meeting, 2003. IEDM '03 Technical Digest. IEEE International》
|
2003年
关键词:
integrated circuit metallisation;
integrated circuit interconnections;
self-assembly;
silicon compounds;
copper;
dielectric thin films;
porous materials;
mechanical strength;
permittivity;
elastic moduli;
self-assembled silica films;
ultra-low-k silica f;
17.
Operational and reliability comparison of discrete-storage nonvolatile memories: advantages of single- and double-layer metal nanocrystals
机译:
离散存储非易失性存储器的操作和可靠性比较:单层和双层金属纳米晶体的优势
作者:
Chungho Lee
;
Gorur-Seetharam A.
;
Kan E.C.
会议名称:
《Electron Devices Meeting, 2003. IEDM '03 Technical Digest. IEEE International》
|
2003年
关键词:
EPROM;
nanoelectronics;
nanostructured materials;
integrated memory circuits;
integrated circuit design;
integrated circuit reliability;
integrated circuit testing;
low-power electronics;
operational comparison;
reliability comparison;
discrete-storage n;
18.
Organic materials for high-density non-volatile memory applications
机译:
高密度非易失性存储应用的有机材料
作者:
Sezi R.
;
Walter A.
;
Engl R.
;
Maltenberger A.
;
Schumann J.
;
Kund M.
;
Dehm C.
会议名称:
《Electron Devices Meeting, 2003. IEDM '03 Technical Digest. IEEE International》
|
2003年
关键词:
random-access storage;
organic compounds;
donor/acceptor complexes;
organic charge transfer complexes;
high-density memory active layer;
data retention time;
endurance;
imprint;
low voltage operation;
memory scalability;
nonvolatile memory;
conductance s;
19.
Organic semiconductor RFID transponders
机译:
有机半导体RFID应答器
作者:
Baude P.F.
;
Ender D.A.
;
Kelley T.W.
;
Haase M.A.
;
Muyres D.V.
;
Theiss S.D.
会议名称:
《Electron Devices Meeting, 2003. IEDM '03 Technical Digest. IEEE International》
|
2003年
关键词:
identification technology;
transponders;
organic semiconductors;
thin film circuits;
radiofrequency integrated circuits;
masks;
coupled circuits;
amplitude modulation;
peak detectors;
thin film organic semiconductor IC;
pentacene-based RFID transponder;
20.
Physical insights on design and modeling of nanoscale FinFETs
机译:
对纳米级FinFET设计和建模的物理见解
作者:
Fossum J.G.
;
Chowdhury M.M.
;
Trivedi V.P.
;
King T.-J.
;
Choi Y.-K.
;
An J.
;
Yu B.
会议名称:
《Electron Devices Meeting, 2003. IEDM '03 Technical Digest. IEEE International》
|
2003年
关键词:
MOSFET;
nanoelectronics;
semiconductor device measurement;
semiconductor device models;
doping profiles;
nanoscale FinFET;
undoped thin-fin body;
gate underlap;
bias-dependent effective channel length;
nonohmic fin-extension voltage drop;
gate positionin;
21.
Physical mechanism for high hole mobility in 110-surface strained- and unstrained-MOSFETs
机译:
110表面应变和非应变MOSFET高空穴迁移率的物理机制
作者:
Mizuno T.
;
Sugiyama N.
;
Tezuka T.
;
Moriyama Y.
;
Nakaharai S.
;
Maeda T.
;
Takagi S.
会议名称:
《Electron Devices Meeting, 2003. IEDM '03 Technical Digest. IEEE International》
|
2003年
关键词:
MOSFET;
silicon-on-insulator;
crystal orientation;
hole mobility;
semiconductor device models;
110-surface MOSFET;
100-surface MOSFET;
hole mobility;
unstrained MOSFET;
surface strained MOSFET;
thin film strained SOI;
unstrained SOI;
current flow dir;
22.
Predictive spiral inductor compact model for frequency and time domain
机译:
频域和时域的预测螺旋电感器紧凑模型
作者:
Tiemeijer L.F.
;
Havens R.J.
;
de Kort R.
;
Bouttement Y.
;
Deixler P.
;
Ryczek M.
会议名称:
《Electron Devices Meeting, 2003. IEDM '03 Technical Digest. IEEE International》
|
2003年
关键词:
inductors;
equivalent circuits;
Q-factor;
skin effect;
predictive spiral inductor compact model;
frequency domain analysis;
time domain analysis;
integrated symmetric inductors;
patterned ground shield;
center tap inductors;
Greenhouse algorithm;
current;
23.
Process roadmap and challenges for metal barriers copper interconnects
机译:
金属阻挡层的工艺路线图和挑战铜互连
作者:
Moon P.
;
Dubin V.
;
Johnston S.
;
Leu J.
;
Raol K.
;
Wu C.
会议名称:
《Electron Devices Meeting, 2003. IEDM '03 Technical Digest. IEEE International》
|
2003年
关键词:
integrated circuit interconnections;
integrated circuit metallisation;
dielectric thin films;
copper;
adhesion;
chemical vapour deposition;
tantalum;
tantalum compounds;
silicon compounds;
metal barrier layers;
interconnect liner;
copper interconnects;
d;
24.
Process-strained Si (PSS) CMOS technology featuring 3D strain engineering
机译:
具有3D应变工程的工艺应变Si(PSS)CMOS技术
作者:
Ge C.-H.
;
Lin C.-C.
;
Ko C.-H.
;
Huang C.-C.
;
Huang Y.-C.
;
Chan B.-W.
;
Perng B.-C.
;
Sheu C.-C.
;
Tsai P.-Y.
;
Yao L.-G.
;
Wu C.-L.
;
Lee T.-L.
;
Chen C.-J.
;
Wang C.-T.
;
Lin S.-C.
;
Yeo Y.-C.
;
Hu C.
会议名称:
《Electron Devices Meeting, 2003. IEDM '03 Technical Digest. IEEE International》
|
2003年
关键词:
CMOS integrated circuits;
semiconductor technology;
silicon;
elemental semiconductors;
process-strained Si technology;
PSS CMOS technology;
3D strain engineering;
trench isolation;
silicide stress engineering;
cap layer;
NMOS;
PMOS;
ring oscillator speed;
25.
Quantitative assessment of mobility degradation by remote Coulomb scattering in ultra-thin oxide MOSFETs: measurements and simulations
机译:
在超薄氧化物MOSFET中通过远程库仑散射对迁移率降低进行定量评估:测量和模拟
作者:
Lucci L.
;
Esseni D.
;
Loo J.
;
Ponomarev Y.
;
Selmi L.
;
Abramo A.
;
Sangiorgi E.
会议名称:
《Electron Devices Meeting, 2003. IEDM '03 Technical Digest. IEEE International》
|
2003年
关键词:
electron mobility;
scattering;
MOSFET;
silicon compounds;
semiconductor device measurement;
semiconductor device models;
mobility degradation;
remote Coulomb scattering;
ultra-thin oxide MOSFET;
electron effective mobility;
pure SiO/sub 2/ bulk MOSFET;
l;
26.
Recent progress in FET-type ferroelectric memories
机译:
FET型铁电存储器的最新进展
作者:
Ishiwara H.
会议名称:
《Electron Devices Meeting, 2003. IEDM '03 Technical Digest. IEEE International》
|
2003年
关键词:
ferroelectric storage;
ferroelectric capacitors;
MOSFET;
FeRAM;
FET type ferroelectric memories;
data retention characteristics;
MFIS;
metal-ferroelectric-insulator-semiconductor structure;
MFMIS-FET;
1T2C-type cell;
ferroelectric capacitors;
MOSFET;
27.
Record efficiency and gain at 2.1 GHz of high power RF transistors for cellular and 3G base stations
机译:
记录蜂窝和3G基站大功率RF晶体管在2.1 GHz时的效率和增益
作者:
Brech H.
;
Brakensiek W.
;
Burdeaux D.
;
Burger W.
;
Dragon C.
;
Formicone G.
;
Pryor B.
;
Rice D.
会议名称:
《Electron Devices Meeting, 2003. IEDM '03 Technical Digest. IEEE International》
|
2003年
关键词:
3G mobile communication;
cellular radio;
UHF field effect transistors;
power MOSFET;
high power RF transistors;
cellular base stations;
3G base stations;
HV6 RF-LDMOS transistor;
two-carrier WCDMA signal;
drain efficiency;
power gain;
transistor linearit;
28.
Reemergence of the surface-potential-based compact MOSFET models
机译:
基于表面电势的紧凑型MOSFET模型的再现
作者:
Gildenblat G.
;
Cai X.
;
Chen T.-L.
;
Gu X.
;
Wang H.
会议名称:
《Electron Devices Meeting, 2003. IEDM '03 Technical Digest. IEEE International》
|
2003年
关键词:
MOSFET;
semiconductor device models;
surface potential;
linearisation techniques;
surface-potential-based compact MOSFET model;
MOSFET modeling;
symmetric linearization method;
streamlined surface potential approximation;
29.
Re-investigation of MOS inversion layer mobility from non-universality and possible new scattering mechanism aspects
机译:
从非通用性和可能的新散射机制方面对MOS反转层迁移率进行重新研究
作者:
Irie H.
;
Kita K.
;
Kyuno K.
;
Toriumi A.
会议名称:
《Electron Devices Meeting, 2003. IEDM '03 Technical Digest. IEEE International》
|
2003年
关键词:
MOSFET;
inversion layers;
carrier mobility;
phonons;
scattering;
doping profiles;
semiconductor device measurement;
angle limited phonon scattering mechanism;
MOS inversion layer mobility;
mobility universality;
effective normal field;
substrate doping c;
30.
Reliability study of CMOS FinFETs
机译:
CMOS FinFET的可靠性研究
作者:
Yang-Kyu Choi
;
Daewon Ha
;
Snow E.
;
Bokor J.
;
Tsu-Jae King
会议名称:
《Electron Devices Meeting, 2003. IEDM '03 Technical Digest. IEEE International》
|
2003年
关键词:
MOSFET;
semiconductor device reliability;
CMOS integrated circuits;
hot carriers;
annealing;
CMOS finFET;
finFET reliability study;
hot-carrier immunity;
fin width;
fin body thickness;
oxide reliability;
gate-length scaling;
self-heating effect;
post-fin;
31.
Room-temperature operation of highly functional single-electron transistor logic based on quantum mechanical effect in ultra-small silicon dot
机译:
基于超小硅点量子力学效应的高性能单电子晶体管逻辑的室温操作
作者:
Saitoh M.
;
Hiramoto T.
会议名称:
《Electron Devices Meeting, 2003. IEDM '03 Technical Digest. IEEE International》
|
2003年
关键词:
single electron transistors;
quantum gates;
semiconductor quantum dots;
silicon;
elemental semiconductors;
MOSFET;
Coulomb blockade;
SET room-temperature operation;
single-electron transistor logic;
quantum mechanical effect;
ultra-small silicon dot;
sin;
32.
Scalability of strained silicon CMOSFET and high drive current enhancement in the 40 nm gate length technology
机译:
40 nm栅极长度技术中的应变硅CMOSFET可扩展性和高驱动电流增强
作者:
Sanuki T.
;
Oishi A.
;
Morimasa Y.
;
Aota S.
;
Kinoshita T.
;
Hasumi R.
;
Takegawa Y.
;
Isobe K.
;
Yoshimura H.
;
Iwai M.
;
Sunouchi K.
;
Noguchi T.
会议名称:
《Electron Devices Meeting, 2003. IEDM '03 Technical Digest. IEEE International》
|
2003年
关键词:
MOSFET;
silicon;
elemental semiconductors;
isolation technology;
large scale integration;
semiconductor technology;
strained silicon CMOSFET;
high drive current enhancement;
strained Si technology scalability;
source/drain length;
PMOSFET;
STI induced st;
33.
Scaled 2bit/cell SONOS type nonvolatile memory technology for sub-90nm embedded application using SiN sidewall trapping structure
机译:
使用SiN侧壁陷获结构的90nm以下嵌入式应用的按比例缩放的2bit /单元SONOS型非易失性存储技术
作者:
Fukuda M.
;
Nakanishi T.
;
Nara Y.
会议名称:
《Electron Devices Meeting, 2003. IEDM '03 Technical Digest. IEEE International》
|
2003年
关键词:
semiconductor-insulator-semiconductor devices;
random-access storage;
semiconductor device models;
silicon;
elemental semiconductors;
silicon compounds;
silicon-oxide-nitride-oxide-semiconductor;
SONOS type nonvolatile memory cell;
SiN sidewall trapping;
34.
Scaling analysis of phase-change memory technology
机译:
相变存储技术的规模分析
作者:
Pirovano A.
;
Lacaita A.L.
;
Benvenuti A.
;
Pellizzer F.
;
Hudgens S.
;
Bez R.
会议名称:
《Electron Devices Meeting, 2003. IEDM '03 Technical Digest. IEEE International》
|
2003年
关键词:
random-access storage;
order-disorder transformations;
semiconductor device models;
germanium compounds;
antimony compounds;
ovonic unified memory;
OUM;
nonvolatile semiconductor technology;
PCM scaling analysis;
chalcogenide-based phase-change memory;
r;
35.
Self-limiting laser thermal process for ultra-shallow junction formation of 50-nm gate CMOS
机译:
自限制激光热工艺可形成50nm栅极CMOS的超浅结
作者:
Shima A.
;
Ashihara H.
;
Mine T.
;
Goto Y.
;
Horiuchi M.
;
Wang Y.
;
Talwar S.
;
Hiraiwa A.
会议名称:
《Electron Devices Meeting, 2003. IEDM '03 Technical Digest. IEEE International》
|
2003年
关键词:
MOSFET;
laser materials processing;
self-limiting laser thermal process;
ultra-shallow junction formation;
CMOS devices;
SL-LTP;
laser exposure window;
MOSFET;
laser fluence induced drain current increase;
50 nm;
36.
Series-resonant micromechanical resonator oscillator
机译:
串联谐振微机械谐振器
作者:
Yu-Wei Lin
;
Seungbae Lee
;
Zeying Ren
;
Nguyen C.T.C.
会议名称:
《Electron Devices Meeting, 2003. IEDM '03 Technical Digest. IEEE International》
|
2003年
关键词:
micromechanical resonators;
radiofrequency oscillators;
micromachining;
series resonant oscillator;
micromechanical resonator oscillator;
zero-phase-shift sustaining amplifier;
clamped-clamped beam resonator;
relatively large width;
lower series motional;
37.
SiGe HBT and BiCMOS technologies
机译:
SiGe HBT和BiCMOS技术
作者:
Washio K.
会议名称:
《Electron Devices Meeting, 2003. IEDM '03 Technical Digest. IEEE International》
|
2003年
关键词:
BiCMOS integrated circuits;
Ge-Si alloys;
semiconductor materials;
heterojunction bipolar transistors;
doping profiles;
large scale integration;
semiconductor technology;
BiCMOS technology;
self-aligned SiGe HBT structures;
thin base structures;
impurity;
38.
SiGe:C BiCMOS technology with 3.6 ps gate delay
机译:
具有3.6 ps栅极延迟的SiGe:C BiCMOS技术
作者:
Rucker H.
;
Heinemann B.
;
Barth R.
;
Bolze D.
;
Drews J.
;
Haak U.
;
Hoppner W.
;
Knoll D.
;
Kopke K.
;
Marschmeyer S.
;
Richter H.H.
;
Schley P.
;
Schmidt D.
;
Scholz R.
;
Tillack B.
;
Winkler W.
;
Wulf H.-E.
;
Yamamoto Y.
会议名称:
《Electron Devices Meeting, 2003. IEDM '03 Technical Digest. IEEE International》
|
2003年
关键词:
BiCMOS integrated circuits;
heterojunction bipolar transistors;
millimetre wave bipolar transistors;
Ge-Si alloys;
semiconductor materials;
carbon;
BiCMOS technology;
gate delay;
high-speed HBT technology;
extrinsic base construction;
low-resistance coll;
39.
Static noise margin of the full DG-CMOS SRAM cell using bulk FinFETs (Omega MOSFETs)
机译:
使用批量FinFET(Omega MOSFET)的整个DG-CMOS SRAM单元的静态噪声容限
作者:
Park T.
;
Cho H.J.
;
Choe J.D.
;
Han S.Y.
;
Jung S.-M.
;
Jeong J.H.
;
Nam B.Y.
;
Kwon O.I.
;
Han J.N.
;
Kang H.S.
;
Chae M.C.
;
Yeo G.S.
;
Lee S.W.
;
Lee D.Y.
;
Park D.
;
Kim K.
;
Yoon E.
;
Lee J.H.
会议名称:
《Electron Devices Meeting, 2003. IEDM '03 Technical Digest. IEEE International》
|
2003年
关键词:
SRAM chips;
CMOS memory circuits;
ultraviolet lithography;
chemical mechanical polishing;
nitridation;
oxidation;
rapid thermal annealing;
contact resistance;
scanning electron microscopy;
integrated circuit noise;
operational six-transistor SRAM cell;
b;
40.
Statistical simulations to inspect and predict data retention and program disturbs in flash memories
机译:
统计模拟,以检查和预测闪存中的数据保留和程序干扰
作者:
Larcher L.
;
Pavan P.
会议名称:
《Electron Devices Meeting, 2003. IEDM '03 Technical Digest. IEEE International》
|
2003年
关键词:
flash memories;
integrated circuit reliability;
integrated circuit modelling;
leakage currents;
statistical analysis;
leakage current statistics;
statistical simulations;
data retention;
program disturbs;
flash memory reliability;
stress-induced leakage;
41.
Substrate transfer: enabling technology for RF applications
机译:
基板转移:射频应用的使能技术
作者:
Dekker R.
;
Dessein K.
;
Fock J.-H.
;
Gakis A.
;
Jonville C.
;
Kuijken O.M.
;
Michielsen T.M.
;
Mijlemans P.
;
Pohlmann H.
;
Schnitt W.
;
Timmering C.E.
;
Tombeur A.M.H.
会议名称:
《Electron Devices Meeting, 2003. IEDM '03 Technical Digest. IEEE International》
|
2003年
关键词:
wafer bonding;
adhesive bonding;
substrates;
III-V semiconductors;
integrated circuit manufacture;
printed circuit manufacture;
silicon;
elemental semiconductors;
radiofrequency integrated circuits;
gluing;
backend process step;
substrate transfer;
RF ap;
42.
Substrate-strained silicon technology: process integration CMOS technology
机译:
衬底应变硅技术:工艺集成CMOS技术
作者:
Wang H.C.-H.
;
Wang Y.-P.
;
Chen S.-J.
;
Ge C.-H.
;
Ting S.M.
;
Kung J.-Y.
;
Hwang R.-L.
;
Chiu H.-K.
;
Sheu L.C.
;
Tsai P.-Y.
;
Yao L.-G.
;
Chen S.-C.
;
Tao H.-J.
;
Yeo Y.-C.
;
Lee W.-C.
;
Hu C.
会议名称:
《Electron Devices Meeting, 2003. IEDM '03 Technical Digest. IEEE International》
|
2003年
关键词:
CMOS integrated circuits;
silicon;
elemental semiconductors;
oscillators;
leakage currents;
integrated circuit manufacture;
substrate-strained silicon technology;
Si CMOS technology process integration;
ring oscillator speed;
self-heating effect;
manufac;
43.
Technology scaling effects on the ESD design parameters in sub-100 nm CMOS transistors
机译:
技术缩放对低于100 nm CMOS晶体管中ESD设计参数的影响
作者:
Boselli G.
;
Rodriguez J.
;
Duvvury C.
;
Reddy V.
;
Chidambaram P.R.
;
Hornung B.
会议名称:
《Electron Devices Meeting, 2003. IEDM '03 Technical Digest. IEEE International》
|
2003年
关键词:
electrostatic discharge;
MOSFET;
CMOS integrated circuits;
protection;
integrated circuit reliability;
integrated circuit design;
nanoelectronics;
doping profiles;
ion implantation;
technology scaling effects;
ESD design;
CMOS transistors;
nMOS triggerin;
44.
The impact of substrate surface potential on the performance of RF power LDMOSFETs on high-resistivity SOI
机译:
衬底表面电势对高阻SOI上RF功率LDMOSFET的性能的影响
作者:
Scholvin J.
;
Fiorenza J.G.
;
del Alamo J.A.
会议名称:
《Electron Devices Meeting, 2003. IEDM '03 Technical Digest. IEEE International》
|
2003年
关键词:
power MOSFET;
microwave power transistors;
silicon-on-insulator;
semiconductor device models;
semiconductor device measurement;
surface potential;
equivalent circuit model;
substrate surface potential;
RF power LDMOSFET;
high-resistivity SOI;
RF power pe;
45.
The integration of proton bombardment process into the manufacturing of mixed-signal/RF chips
机译:
将质子轰击过程集成到混合信号/ RF芯片的制造中
作者:
Tang D.D.
;
Lin W.C.
;
Lai L.S.
;
Wang C.H.
;
Lee L.P.
;
Hsu H.M.
;
Wu C.M.
;
Chang C.W.
;
Lien W.Y.
;
Chao C.P.
;
Lee C.Y.
;
Chern G.J.
;
Guo J.C.
;
Chang C.S.
;
Sun Y.C.
;
Du D.S.
;
Lan K.C.
;
Lin L.F.
会议名称:
《Electron Devices Meeting, 2003. IEDM '03 Technical Digest. IEEE International》
|
2003年
关键词:
mixed analogue-digital integrated circuits;
radiofrequency integrated circuits;
proton effects;
ion implantation;
thermal stability;
inductors;
MOSFET;
protons;
proton bombardment process;
mixed-signal IC;
RFIC;
post-backend process module;
local semi-in;
46.
Thermal analysis of ultra-thin body device scaling SOI and FinFet devices
机译:
超薄体设备结垢的热分析SOI和FinFet设备
作者:
Pop E.
;
Dutton R.
;
Goodson K.
会议名称:
《Electron Devices Meeting, 2003. IEDM '03 Technical Digest. IEEE International》
|
2003年
关键词:
MOSFET;
silicon-on-insulator;
thermal analysis;
semiconductor device models;
heat conduction;
ultra-thin body device scaling;
thermal analysis;
confined dimensions;
self-heating;
SOI;
FinFET;
compact thermal model;
nanoscale heat conduction;
drain extens;
47.
Thin oxynitride solution for digital and mixed-signal 65nm CMOS platform
机译:
用于数字和混合信号65nm CMOS平台的薄氮氧化物解决方案
作者:
Tavel B.
;
Bidaud M.
;
Emonet N.
;
Barge D.
;
Planes N.
;
Brut H.
;
Roy D.
;
Vildeuil J.C.
;
Difrenza R.
;
Rochereau K.
;
Denais M.
;
Huard V.
;
Llinares P.
;
Bruyere S.
;
Parthasarthy C.
;
Revil N.
;
Pantel R.
;
Guyader F.
;
Vishnubotla L.
;
Barla K.
;
Arnaud F.
;
Stolk P.
;
Woo M.
会议名称:
《Electron Devices Meeting, 2003. IEDM '03 Technical Digest. IEEE International》
|
2003年
关键词:
nitridation;
CMOS integrated circuits;
mixed analogue-digital integrated circuits;
plasma materials processing;
leakage currents;
thin oxynitride gate;
digital CMOS;
mixed-signal CMOS;
plasma nitrided gate oxide;
gate leakage reduction;
65 nm;
0.9 V;
48.
Threshold voltage control in NiSi-gated MOSFETs through silicidation induced impurity segregation (SIIS)
机译:
通过硅化引起的杂质隔离(SIIS)来控制NiSi门控MOSFET中的阈值电压
作者:
Kedzierski J.
;
Boyd D.
;
Ronsheim P.
;
Zafar S.
;
Newbury J.
;
Ott J.
;
Cabral C. Jr.
;
Ieong M.
;
Haensch W.
会议名称:
《Electron Devices Meeting, 2003. IEDM '03 Technical Digest. IEEE International》
|
2003年
关键词:
MOSFET;
silicon-on-insulator;
doping profiles;
work function;
impurity distribution;
segregation;
nickel compounds;
phosphorus;
arsenic;
antimony;
MOSFET threshold voltage control;
NiSi-gated MOSFET;
silicidation induced impurity segregation;
SIIS;
workf;
49.
Towards microscopic understanding of MOSFET reliability: the role of carrier energy and transport simulations
机译:
对MOSFET可靠性的微观理解:载流子能量和传输模拟的作用
作者:
Selmi L.
;
Esseni D.
;
Palestri P.
会议名称:
《Electron Devices Meeting, 2003. IEDM '03 Technical Digest. IEEE International》
|
2003年
关键词:
MOSFET;
semiconductor device models;
semiconductor device breakdown;
semiconductor device reliability;
carrier mobility;
ballistic transport;
hot carriers;
thermal stability;
oxide breakdown;
bias-temperature instability;
MOSFET reliability microscopic u;
50.
Tunnel current measurements on P/N junction diodes and implications for future device design
机译:
P / N结二极管上的隧道电流测量及其对未来器件设计的影响
作者:
Solomon P.M.
;
Frank D.J.
;
Jopling J.
;
DEmic C.
;
Dokumaci O.
;
Ronsheim P.
;
Haensch W.E.
会议名称:
《Electron Devices Meeting, 2003. IEDM '03 Technical Digest. IEEE International》
|
2003年
关键词:
semiconductor diodes;
semiconductor device measurement;
tunnelling;
leakage currents;
low-power electronics;
electric current measurement;
tunnel current measurement;
P/N junction diodes;
band-to-band tunneling;
ion-implanted PN junction diodes;
diode pr;
51.
UHF micromechanical extensional wine-glass mode ring resonators
机译:
UHF微机械拉伸酒杯模式环形谐振器
作者:
Yuan Xie
;
Sheng-Shian Li
;
Yu-Wei Lin
;
Zeying Ren
;
Nguyen C.T.C.
会议名称:
《Electron Devices Meeting, 2003. IEDM '03 Technical Digest. IEEE International》
|
2003年
关键词:
micromechanical resonators;
UHF generation;
Q-factor;
electrostatic devices;
UHF ring resonators;
micromechanical ring resonators;
extensional wine-glass mode shape;
vibrating polysilicon resonators;
resonator impedance;
Q factor;
motional resistance;
dc;
52.
Ultra-low thermal budget CMOS process for 65nm-node low-operation-power applications
机译:
适用于65nm节点低工作功率应用的超低热预算CMOS工艺
作者:
Ootsuka F.
;
Ozaki H.
;
Sasaki T.
;
Yamashita K.
;
Takada H.
;
Izumi N.
;
Nakagawa Y.
;
Hayashi M.
;
Kiyono K.
;
Yasuhira M.
;
Arikado T.
会议名称:
《Electron Devices Meeting, 2003. IEDM '03 Technical Digest. IEEE International》
|
2003年
关键词:
CMOS integrated circuits;
MOSFET;
low-power electronics;
annealing;
ultra-low thermal budget CMOS process;
low power operation;
CMOS transistors;
ultra-shallow junctions;
flash lamp annealing;
pFETs;
solid phase epitaxial extension junction;
extension ju;
53.
Universal recovery behavior of negative bias temperature instability PMOSFETs
机译:
负偏置温度不稳定性的通用恢复行为PMOSFETs
作者:
Rangan S.
;
Mielke N.
;
Yeh E.C.C.
会议名称:
《Electron Devices Meeting, 2003. IEDM '03 Technical Digest. IEEE International》
|
2003年
关键词:
MOSFET;
semiconductor device measurement;
semiconductor device models;
thermal stability;
thermal stresses;
negative bias temperature instability;
PMOSFET;
post-stress NBTI recovery;
stress voltage;
stress time;
stress temperature;
degradation mechanism;
54.
Vertical multi-RESURF MOSFETs exhibiting record low specific resistance
机译:
垂直多RESURF MOSFET表现出创纪录的低电阻率
作者:
van Dalen R.
;
Rochefort C.
会议名称:
《Electron Devices Meeting, 2003. IEDM '03 Technical Digest. IEEE International》
|
2003年
关键词:
semiconductor device measurement;
semiconductor device models;
semiconductor device breakdown;
power MOSFET;
isolation technology;
semiconductor doping;
power MOSFET;
vertical multi-RESURF MOSFET;
low specific resistance;
drift region alternating pn-junc;
55.
Wafer scale biomolecule grafting: the first step for low cost, high throughput active biochip manufacturing
机译:
晶圆级生物分子移植:低成本,高通量活性生物芯片制造的第一步
作者:
Caillat P.
;
Cuzin M.
;
Hofmeister A.
会议名称:
《Electron Devices Meeting, 2003. IEDM '03 Technical Digest. IEEE International》
|
2003年
关键词:
biosensors;
CMOS integrated circuits;
molecular biophysics;
biomedical electronics;
probes;
DNA;
CMOS;
wafer scale biomolecule grafting;
active biochip manufacturing;
massively parallel biology analysis systems;
biosensors;
low cost mass production;
wafe;
56.
Writing current reduction for high-density phase-change RAM
机译:
高密度相变RAM的写入电流降低
作者:
Hwang Y.N.
;
Lee S.H.
;
Ahn S.J.
;
Lee S.Y.
;
Ryoo K.C.
;
Hong H.S.
;
Koo H.C.
;
Yeung F.
;
Oh J.H.
;
Kim H.J.
;
Jeong W.C.
;
Park J.H.
;
Horii H.
;
Ha Y.H.
;
Yi J.H.
;
Koh G.H.
;
Jeong G.T.
;
Jeong H.S.
;
Kinam Kim
会议名称:
《Electron Devices Meeting, 2003. IEDM '03 Technical Digest. IEEE International》
|
2003年
关键词:
random-access storage;
order-disorder transformations;
nonvolatile memories;
RAM writing current reduction;
high-density phase-change RAM;
chalcogenide memory element;
phase-change random access memory;
phase transition;
contact size;
cell size;
cell thi;
57.
2D QM simulation and optimization of decanano non-overlapped MOS devices
机译:
decanano不重叠MOS器件的2D QM模拟和优化
作者:
Gusmeroli R.
;
Spinelli A.S.
;
Pirovano A.
;
Lacaita A.L.
;
Boeuf F.
;
Skotnicki T.
会议名称:
《Electron Devices Meeting, 2003. IEDM '03 Technical Digest. IEEE International》
|
2003年
关键词:
MOSFET;
semiconductor device models;
optimisation;
quantum theory;
MOSFET;
2D quantum-mechanical simulation;
device optimization;
decanano nonoverlapped MOS devices;
design trade-offs;
switching time improvement;
58.
Atomistic 3D process/device simulation considering gate line-edge roughness and poly-Si random crystal orientation effects MOSFETs
机译:
考虑栅极线边缘粗糙度和多晶硅随机晶体取向效应的原子3D工艺/器件仿真MOSFETs
作者:
Hane M.
;
Ikezawa T.
;
Ezaki T.
会议名称:
《Electron Devices Meeting, 2003. IEDM '03 Technical Digest. IEEE International》
|
2003年
关键词:
MOSFET;
semiconductor device models;
semiconductor process modelling;
silicon;
elemental semiconductors;
crystal orientation;
statistical analysis;
ion implantation;
doping profiles;
Monte Carlo methods;
diffusion;
potential energy functions;
fluctuation;
59.
Atomistic tight-binding calculations for the investigation of transport in extremely scaled SOI transistors
机译:
原子紧密结合计算,用于研究超大规模SOI晶体管中的传输
作者:
Stadele M.
;
Di Carlo A.
;
Lugli P.
;
Sacconi F.
;
Tuttle B.
会议名称:
《Electron Devices Meeting, 2003. IEDM '03 Technical Digest. IEEE International》
|
2003年
关键词:
silicon-on-insulator;
MOSFET;
tight-binding calculations;
tunnelling;
semiconductor device models;
atomistic tight-binding calculations;
carrier transport;
extremely scaled SOI transistors;
direct gate oxide tunneling;
defect-assisted gate oxide tunnelin;
60.
Breakdown voltage limitations, impact ionization, and interband tunneling in InP/GaAsSb/InP type-II NpN DHBTs
机译:
InP / GaAsSb / InP II型NpN DHBT中的击穿电压限制,碰撞电离和带间隧穿
作者:
Bolognesi C.R.
;
Watkins S.P.
;
Moll N.
会议名称:
《Electron Devices Meeting, 2003. IEDM '03 Technical Digest. IEEE International》
|
2003年
关键词:
heterojunction bipolar transistors;
semiconductor device breakdown;
impact ionisation;
Zener effect;
tunnelling;
indium compounds;
III-V semiconductors;
gallium compounds;
breakdown voltage limitations;
electron impact ionization coefficient;
Zener tunne;
61.
Characterization of multi-bit soft error events in advanced SRAMs
机译:
先进SRAM中多位软错误事件的表征
作者:
Maiz J.
;
Hareland S.
;
Zhang K.
;
Armstrong P.
会议名称:
《Electron Devices Meeting, 2003. IEDM '03 Technical Digest. IEEE International》
|
2003年
关键词:
error statistics;
error correction codes;
SRAM chips;
cache storage;
microprocessor chips;
CMOS memory circuits;
integrated circuit reliability;
failure analysis;
integrated circuit testing;
multi-bit soft error events;
SRAM;
error correction code scheme;
62.
Compatibility of dual metal gate electrodes with high-k dielectrics for CMOS
机译:
具有高k电介质的双金属栅电极与CMOS的兼容性
作者:
JaeHoon Lee
;
You-Seok Suh
;
Lazar H.
;
Jha R.
;
Gurganus J.
;
Yanxia Lin
;
Misra V.
会议名称:
《Electron Devices Meeting, 2003. IEDM '03 Technical Digest. IEEE International》
|
2003年
关键词:
MOS capacitors;
dielectric thin films;
work function;
annealing;
ruthenium;
ruthenium alloys;
hafnium compounds;
tantalum alloys;
tantalum compounds;
silicon compounds;
bulk CMOS devices;
dual metal gate electrodes;
high-k dielectrics;
electrode/dielectr;
63.
Device design considerations for ultra-thin SOI MOSFETs
机译:
超薄SOI MOSFET的器件设计注意事项
作者:
Doris B.
;
Ieong M.
;
Zhu T.
;
Zhang Y.
;
Steen M.
;
Natzle W.
;
Callegari S.
;
Narayanan V.
;
Cai J.
;
Ku S.H.
;
Jamison P.
;
Li Y.
;
Ren Z.
;
Ku V.
;
Boyd T.
;
Kanarsky T.
;
DEmic C.
;
Newport M.
;
Dobuzinsky D.
;
Deshpande S.
;
Petrus J.
;
Jammy R.
;
Haensch W.
会议名称:
《Electron Devices Meeting, 2003. IEDM '03 Technical Digest. IEEE International》
|
2003年
关键词:
MOSFET;
silicon-on-insulator;
tungsten;
elemental semiconductors;
silicon;
hafnium compounds;
ultra-thin SOI MOSFET;
UTSOI;
gate-length scaling;
external resistance minimization;
raised extension process flow;
REX process scheme;
pFET;
planar single gate;
64.
Device physics at the scaling limit: what matters? MOSFETs
机译:
设备物理处于缩放极限:什么重要? MOSFETs
作者:
Lundstrom M.
会议名称:
《Electron Devices Meeting, 2003. IEDM '03 Technical Digest. IEEE International》
|
2003年
关键词:
MOSFET;
semiconductor device models;
nanoelectronics;
ballistic transport;
scattering;
quantum theory;
ballistic MOSFET;
scattering;
quantum mechanical effects;
scaling limit device physics;
nanoscale MOSFET;
device performance limitations;
65.
Drastically reduced dark current by pulse-time-modulated plasma for precise micro lens fabrication in highly sensitive CCD image sensor
机译:
脉冲时间调制等离子体极大地降低了暗电流,可用于高灵敏度CCD图像传感器中的精密微透镜制造
作者:
Ishikawa Y.
;
Okigawa M.
;
Ichihashi Y.
;
Samukawa S.
会议名称:
《Electron Devices Meeting, 2003. IEDM '03 Technical Digest. IEEE International》
|
2003年
关键词:
CCD image sensors;
microlenses;
dark conductivity;
sputter etching;
interface states;
dark current reduction;
pulse-time-modulated plasma etching;
micro lens fabrication;
CCD image sensor;
charge coupled device image sensors;
interface states;
UV photon;
66.
Fermi level pinning with sub-monolayer MeOx and metal gates MOSFETs
机译:
亚单层MeOx和金属栅极MOSFET的费米能级钉扎
作者:
Samavedam S.B.
;
La L.B.
;
Tobin P.J.
;
White B.
;
Hobbs C.
;
Fonseca L.R.C.
;
Demkov A.A.
;
Schaeffer J.
;
Luckowski E.
;
Martinez A.
;
Raymond M.
;
Triyoso D.
;
Roan D.
;
Dhandapani V.
;
Garcia R.
;
Anderson S.G.H.
;
Moore K.
;
Tseng H.H.
;
Capasso C.
;
Adetutu O.
;
Gilmer D.C.
;
Taylor W.J.
;
Hegde R.
;
Grant J.
会议名称:
《Electron Devices Meeting, 2003. IEDM '03 Technical Digest. IEEE International》
|
2003年
关键词:
MOSFET;
Fermi level;
metal-insulator boundaries;
work function;
tantalum compounds;
titanium compounds;
silicon compounds;
alumina;
hafnium compounds;
Fermi level pinning;
sub-monolayer MeOx;
metal gates;
metal/dielectric interface changes;
metal work-fu;
67.
Fluorine implantation impact in extension region on the electrical performance of sub-50nm P-MOSFETs
机译:
扩展区中的氟注入对50nm以下P-MOSFET的电性能产生影响
作者:
Fukutome H.
;
Momiyama Y.
;
Nakao H.
;
Aoyama T.
;
Arimoto H.
会议名称:
《Electron Devices Meeting, 2003. IEDM '03 Technical Digest. IEEE International》
|
2003年
关键词:
MOSFET;
fluorine;
doping profiles;
scanning tunnelling microscopy;
fluorine implantation;
P-MOSFET extension region;
F-tub region;
drive current;
scanning tunneling microscopy;
STM;
2D carrier profiling;
overlap length reduction;
steep lateral abruptness;
68.
Fully compatible integration of high density embedded DRAM with 65nm CMOS technology (CMOS5)
机译:
与65nm CMOS技术(CMOS5)完全兼容的高密度嵌入式DRAM集成
作者:
Matsubara Y.
;
Habu M.
;
Matsuda S.
;
Honda K.
;
Morifuji E.
;
Yoshida T.
;
Kokubun K.
;
Yasumoto K.
;
Sakurai T.
;
Suzuki T.
;
Yoshikawa J.
;
Takahashi E.
;
Hiyama K.
;
Kanda M.
;
Ishizuka R.
;
Moriuchi M.
;
Koga H.
;
Fukuzaki Y.
;
Sogo Y.
;
Takahashi H.
;
Nagashima N.
;
Okamoto Y.
;
Yamada S.
;
Noguchi T.
会议名称:
《Electron Devices Meeting, 2003. IEDM '03 Technical Digest. IEEE International》
|
2003年
关键词:
DRAM chips;
CMOS memory circuits;
copper alloys;
integrated circuit interconnections;
integrated circuit metallisation;
boron compounds;
system-on-chip;
dielectric thin films;
Cu dual-damascene interconnects;
high density DRAM yield;
ADM;
tapered BF/sub;
69.
High-k dielectrics and MOSFET characteristics
机译:
高k电介质和MOSFET特性
作者:
Lee J.C.
;
Cho H.J.
;
Kang C.S.
;
Rhee S.
;
Kim Y.H.
;
Choi R.
;
Kang C.Y.
;
Choi C.
;
Abkar M.
会议名称:
《Electron Devices Meeting, 2003. IEDM '03 Technical Digest. IEEE International》
|
2003年
关键词:
MOSFET;
dielectric thin films;
semiconductor device reliability;
optimisation;
doping profiles;
annealing;
carrier mobility;
high-k dielectrics;
MOSFET characteristics;
gate dielectrics;
interfacial layer optimization;
N incorporation;
Si incorporation;
70.
How far will silicon nanocrystals push the scaling limits of NVMs technologies?
机译:
硅纳米晶体将推动NVM技术的扩展极限到什么程度?
作者:
De Salvo B.
;
Gerardi C.
;
Lombardo S.
;
Baron T.
;
Perniola L.
;
Mariolle D.
;
Mur P.
;
Toffoli A.
;
Gely M.
;
Semeria M.N.
;
Deleonibus S.
;
Ammendola G.
;
Ancarani V.
;
Melanotte M.
;
Bez R.
;
Baldi L.
;
Corso D.
;
Crupi I.
;
Puglisi R.A.
;
Nicotra G.
;
Rimini E.
;
Mazen F.
;
Ghibaudo G.
;
Pananakakis G.
;
Compagnoni C.M.
;
Ielmini D.
;
Lacaita A.
;
Spinelli A.
;
Wan Y.M.
;
van der Jeugd K.
会议名称:
《Electron Devices Meeting, 2003. IEDM '03 Technical Digest. IEEE International》
|
2003年
关键词:
chemical vapour deposition;
nanoelectronics;
nanostructured materials;
integrated circuit technology;
random-access storage;
silicon;
elemental semiconductors;
statistical analysis;
integrated circuit modelling;
flash memories;
integrated circuit design;
71.
Hybrid silicon/molecular memories: co-engineering for novel functionality
机译:
混合硅/分子存储器:共同设计新功能
作者:
Gowda S.
;
Mathur G.
;
Qihang Li
;
Surthi S.
;
Qian Zhao
;
Lindsey J.S.
;
Mobley K.
;
Bocian D.F.
;
Misra V.
会议名称:
《Electron Devices Meeting, 2003. IEDM '03 Technical Digest. IEEE International》
|
2003年
关键词:
silicon;
elemental semiconductors;
nanoelectronics;
molecular electronics;
hybrid integrated circuits;
CMOS memory circuits;
integrated circuit measurement;
hybrid silicon/molecular memories;
co-engineering;
functionality;
hybrid CMOS/molecular capacitor;
72.
Improvement of NBTI and electrical characteristics by ozone pre-treatment and PBTI issues in HfAlO(N) high-k gate dielectrics
机译:
通过HfAlO(N)高k栅极电介质中的臭氧预处理和PBTI问题改善NBTI和电特性
作者:
Seok Joo Doh
;
Hyung-Suk Jung
;
Yun-Seok Kim
;
Ha-Jin Lim
;
Jong Pyo Kim
;
Jung Hyoung Lee
;
Jong-Ho Lee
;
Nae-In Lee
;
Ho-Kyu Kan
;
Kwang-Pyuk Suh
;
Seong Geon Park
;
Sang Bom Kang
;
Gil Heyun Choi
;
Young-Su Chung
;
Hion-Suck Baikz
;
Hdyo-Sik Chang
;
Mann-Ho Cho
;
Dae-Won Moon
;
Hong Bae Park
;
Moonju Cho
;
Cheol Seong Hwang
会议名称:
《Electron Devices Meeting, 2003. IEDM '03 Technical Digest. IEEE International》
|
2003年
关键词:
dielectric thin films;
MOSFET;
hafnium compounds;
ozone;
thermal stability;
bias temperature instability;
NBTI improvement;
ozone pre-treatment;
high-k gate dielectrics;
impurity incorporation suppression;
PBTI characteristics degradation;
high-k gate st;
73.
Integration and reliability issues of Cu/SiOC interconnect for ArF/90 nm node SoC manufacturing
机译:
用于ArF / 90 nm节点SoC制造的Cu / SiOC互连的集成和可靠性问题
作者:
Noguchi J.
;
Oshima T.
;
Tanaka U.
;
Sasajima K.
;
Aoki H.
;
Sato K.
;
Ishikawa K.
;
Saito T.
;
Konishi N.
;
Hotta S.
;
Uno S.
;
Kikushima K.
会议名称:
《Electron Devices Meeting, 2003. IEDM '03 Technical Digest. IEEE International》
|
2003年
关键词:
copper;
integrated circuit metallisation;
integrated circuit interconnections;
integrated circuit reliability;
photolithography;
chemical mechanical polishing;
electromigration;
silicon compounds;
electric breakdown;
electric resistance;
thermal stresses;
74.
Investigation of performance limits of germanium double-gated MOSFETs
机译:
锗双栅MOSFET的性能极限研究
作者:
Low T.
;
Hou Y.T.
;
Li M.F.
;
Chunxiang Zhu
;
Chin A.
;
Samudra G.
;
Chan L.
;
Kwong D.-L.
会议名称:
《Electron Devices Meeting, 2003. IEDM '03 Technical Digest. IEEE International》
|
2003年
关键词:
MOSFET;
germanium;
elemental semiconductors;
semiconductor device models;
Green's function methods;
leakage currents;
WKB calculations;
tunnelling;
MOSFET performance limits;
double-gated MOSFET;
ultra-thin body n-MOSFET;
Ge channel n-MOSFET;
UTB;
nonequ;
75.
Issues in NiSi-gated FDSOI device integration
机译:
NiSi门控FDSOI设备集成中的问题
作者:
Kedzierski J.
;
Boyd D.
;
Ying Zhang
;
Steen M.
;
Jamin F.F.
;
Benedict J.
;
Meikei Ieong
;
Haensch W.
会议名称:
《Electron Devices Meeting, 2003. IEDM '03 Technical Digest. IEEE International》
|
2003年
关键词:
silicon-on-insulator;
nickel compounds;
chemical mechanical polishing;
NiSi-gated FDSOI device integration;
SOI;
thin-body FDSOI;
fully depleted silicon on insulator devices;
gate length;
gate CMP;
nickel silicide phase stability;
parasitic resistance;
2;
76.
Optimized strained Si/strained Ge dual-channel heterostructures for high mobility P- and N-MOSFETs
机译:
针对高迁移率P和N-MOSFET的优化应变Si /应变Ge双通道异质结构
作者:
Lee M.L.
;
Fitzgerald E.A.
会议名称:
《Electron Devices Meeting, 2003. IEDM '03 Technical Digest. IEEE International》
|
2003年
关键词:
MOSFET;
silicon;
germanium;
elemental semiconductors;
Ge-Si alloys;
semiconductor materials;
hole mobility;
electron mobility;
strained Si/strained Ge dual-channel heterostructures;
high mobility P-MOSFET;
N-MOSFET;
relaxed SiG;
layer thickness optimizat;
77.
Program/erase dynamics and channel conduction in nanocrystal memories
机译:
纳米晶体存储器中的编程/擦除动力学和通道传导
作者:
Monzio Compagnoni C.
;
Ielmini D.
;
Spinelli A.S.
;
Lacaita A.L.
;
Gerardi C.
;
Perniola L.
;
De Salvo B.
;
Lombardo S.
会议名称:
《Electron Devices Meeting, 2003. IEDM '03 Technical Digest. IEEE International》
|
2003年
关键词:
nanoelectronics;
nanostructured materials;
integrated memory circuits;
tunnelling;
integrated circuit modelling;
carrier mobility;
circuit optimisation;
program/erase dynamics;
channel conduction;
nanocrystal memories;
program/erase transients;
carrier c;
78.
Reliability issues for high-k gate dielectrics
机译:
高k栅极电介质的可靠性问题
作者:
Oates A.S.
会议名称:
《Electron Devices Meeting, 2003. IEDM '03 Technical Digest. IEEE International》
|
2003年
关键词:
semiconductor device reliability;
electric breakdown;
dielectric thin films;
MIS devices;
time dependent dielectric breakdown;
hot carrier aging;
NMOS;
PMOS;
high-k gate dielectric reliability;
Si CMOS processes;
high-k materials;
asymmetric gate band st;
79.
Reliability models of data retention and read-disturb in 2-bit nitride storage flash memory cells
机译:
2位氮化物存储闪存单元中数据保留和读取干扰的可靠性模型
作者:
Wang T.
;
Tsai W.J.
;
Gu S.H.
;
Chan C.T.
;
Yeh C.C.
;
Zous N.K.
;
Lu T.C.
;
Pan S.
;
Lu C.Y.
会议名称:
《Electron Devices Meeting, 2003. IEDM '03 Technical Digest. IEEE International》
|
2003年
关键词:
flash memories;
integrated circuit measurement;
integrated circuit modelling;
integrated circuit reliability;
data retention reliability models;
memory read-disturb;
nitride storage flash memory cells;
threshold voltage instability;
state charge loss;
ce;
80.
RF passive devices on Si with excellent performance close to ideal devices designed by electro-magnetic simulation
机译:
Si上的射频无源器件,具有出色的性能,接近通过电磁仿真设计的理想器件
作者:
Chin A.
;
Chan K.T.
;
Huang C.H.
;
Chen C.
;
Liang V.
;
Chen J.K.
;
Chien S.C.
;
Sun S.W.
;
Duh D.S.
;
Lin W.J.
;
Chunxiang Zhu
;
Li M.F.
;
McAlister S.P.
;
Dim-Lee Kwong
会议名称:
《Electron Devices Meeting, 2003. IEDM '03 Technical Digest. IEEE International》
|
2003年
关键词:
inductors;
coplanar waveguides;
microstrip lines;
microstrip filters;
microstrip resonators;
ion implantation;
RF passive devices;
high quality RF inductors;
low loss CPW;
low noise CPW;
microstrip lines;
broad band filters;
narrow band filters;
microstr;
81.
RF performance vulnerability to hot carrier stress and consequent breakdown in low power 90 nm RFCMOS
机译:
RF性能容易受到热载流子应力的影响,并因此在低功耗90 nm RFCMOS中击穿
作者:
Pantisano L.
;
Schreurs D.
;
Kaczer B.
;
Jeamsaksiri W.
;
Venegas R.
;
Degraeve R.
;
Cheung K.P.
;
Groeseneken G.
会议名称:
《Electron Devices Meeting, 2003. IEDM '03 Technical Digest. IEEE International》
|
2003年
关键词:
semiconductor device models;
semiconductor device measurement;
semiconductor device breakdown;
MOSFET;
CMOS integrated circuits;
radiofrequency integrated circuits;
hot carriers;
low-power electronics;
RF performance vulnerability;
hot carrier stress;
ox;
82.
Super-scaled InP HBTs for 150 GHz circuits
机译:
适用于150 GHz电路的超大规模InP HBT
作者:
Zolper J.C.
会议名称:
《Electron Devices Meeting, 2003. IEDM '03 Technical Digest. IEEE International》
|
2003年
关键词:
heterojunction bipolar transistors;
indium compounds;
III-V semiconductors;
mixed analogue-digital integrated circuits;
millimetre wave integrated circuits;
super-scaled HBT;
heterojunction bipolar transistors;
emitter feature size;
HBT scaling;
mixed si;
83.
Taking SOI substrates and low-k dielectrics into high-volume microprocessor production
机译:
将SOI衬底和低k电介质带入大批量微处理器生产
作者:
Greenlaw D.
;
Burbach G.
;
Feudel T.
;
Feustel F.
;
Frohberg K.
;
Graetsch F.
;
Grasshoff G.
;
Hartig C.
;
Heller T.
;
Hempel K.
;
Horstmann M.
;
Huebler P.
;
Kirsch R.
;
Kruegel S.
;
Langer E.
;
Pawlowitsch A.
;
Ruelke H.
;
Schuehrer H.
;
Stephan R.
;
Wei A.
;
Werner T.
;
Wieczorek K.
;
Raab M.
会议名称:
《Electron Devices Meeting, 2003. IEDM '03 Technical Digest. IEEE International》
|
2003年
关键词:
microprocessor chips;
integrated circuit manufacture;
silicon-on-insulator;
dielectric thin films;
SOI substrates;
low-k dielectrics;
high-volume microprocessor production;
production maturity;
high-volume manufacturing;
wafer processing;
transistor deve;
84.
Thousands of microcantilevers for highly parallel and ultra-dense data storage
机译:
数千个微悬臂,用于高度并行和超密集数据存储
作者:
Vettiger P.
;
Albrecht T.
;
Despont M.
;
Drechsler U.
;
Durig U.
;
Gotsmann B.
;
Jubin D.
;
Haberle W.
;
Lantz M.A.
;
Rothuizen H.
;
Stutz R.
;
Wiesmann D.
;
Binnig G.K.
;
Bachtold P.
;
Cherubini G.
;
Hagleitner C.
;
Loeliger T.
;
Pantazi A.
;
Pozidis H.
;
Eleftheriou E.
会议名称:
《Electron Devices Meeting, 2003. IEDM '03 Technical Digest. IEEE International》
|
2003年
关键词:
storage media;
digital storage;
atomic force microscopy;
microactuators;
microsensors;
polymer films;
arrays;
thermomechanical scanning-probe-based data-storage concept;
millipede;
atomic force microscope;
scanning-probe storage;
microcantilevers;
highly;
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