MEMS devices, MEMS switches, mirror actuators and wavelength tunable filters

摘要

Problem to be solved: to provide a MEMS device, a MEMS switch, a mirror actuator and a wavelength tunable filter capable of displacing the movable portion in a flat state.Solution: the MEMS device 1 comprises a fixed portion 11, a movable part 40, a beam portion 12 for connecting the movable part 40 to the fixing part 11, a connecting part 41 for connecting the beam part 12 and the movable part 40, and a driving part D1 for bending the beam part 12 to displace the movable part 40.Drive sectionFixed point pf which is the boundary between fixed part 11 and beam partFixed part 11Beam partIn the piston mode, which is one of the eigenmechanical modes of vibration, which is determined by the structure comprising the movable part 40 and the connection partWhen the movable portion 40 vibrates mostBetween the fixed point PF and the connection part 41, between the bending point PI in the deformation of the beam partThe movable portion 40 is disposed not to protrude.Diagram