LARGE SCALE PRODUCTION EQUIPMENT FOR THE GROWTH OF InGaN/GaN BASED OPTOELECTRONIC DEVICES

摘要

The rapidly increasing market for AlGaInN-based electronic and optoelectronic devices, such as HEMT's, LED's, Lasers, etc. requires large scale production reactors to meet the high demand for high production yield and profitability. This increased yield can only be achieved by higher up-time, low cost of ownership and stable process control.