Fabrication and characterization of GeO_2-PbO optical waveguides

摘要

This work presents studies of GeO_2-PbO thin films deposited by RF Sputtering for fabrication of rib-waveguide. GeO_2-PbO vitreous targets were prepared melting the reagents in alumina crucible. Thin films were deposited at room temperature using pure Ar plasma, at 5 mTorr pressure and RF power of 40 W on substrates of (100) silicon wafers. Rutherford Backscattering Spectroscopy (RBS) analyses were employed for the determination of the chemical elements present in the GeO_2-PbO film. Geometry and sidewall of the waveguides were investigated by Scanning Electron Microscopy (SEM). The mode propagation in the waveguide structure of GeO_2-PbO thin films was analyzed using an integrated optic simulation software to obtain a monomode propagation.