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METHOD OF FABRICATION OF AN OPTICAL WAVEGUIDE SENSOR AND SUCH OPTICAL WAVEGUIDE SENSOR
METHOD OF FABRICATION OF AN OPTICAL WAVEGUIDE SENSOR AND SUCH OPTICAL WAVEGUIDE SENSOR
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机译:光学波导传感器和这种光学波导传感器的制造方法
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摘要
In the present invention, methods to manufacture and devices are disclosed for implementing Fabry-Perot optical waveguide sensors in different configurations. The configurations comprise a deformable membrane (30) fixed to an optical cavity (20) that is adapted to an optical waveguide. The optical cavity comprises at least a longitudinally traversing hollow core connected to the entry and the exit of the optical cavity and comprises a volume of air (50) situated to the side of the entry and a volume of liquid (40) situated to the side of the deformable membrane. The volume of liquid is in contact with the deformable membrane and with the exit of the optical cavity and the volume of air is in fluidic connection, by the volume of liquid, with said deformable membrane.
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