A Z-axis Decoupled Micromachined Gyroscope with Dual Frames

摘要

A z-axis decoupled micromachined gyroscope with dual frames is designed,fabricated and tested. The robust structure considering fabrication errors is obtained by the use of optimal robustness of design and process compensation. The gyroscope is packaged in vacuum, and test results show that quality factor of driving and sensing modes are 2000 and 800, respectively. In the range of 0～2400 deg/sec, sensitivity and linearity of the fabricated gyroscope are 1 deg/sec and 0.3％, respectively.