Analysis of the structures and characteristics for an InP-based micromechanical tunable filter

摘要

In this letter,a InP-based micromechanical tuneable filter by electrostatic actuation is introducedThrough simulation of the DBR reflectance spectra and the F-P cavity transimission spectra,the filter performance is studied.By means of finite element method,the tunning characteristics of the filters based on several typical micromechanical structures are presented.The dynamical behavior of the top mirror is investigated.In addition,the flatness of the top mirror are compared among these structures. It would be valuable reference for InP-based micromechanical F-P cavity device design and optimization.