Suspended Heater Embedded Metal Oxide Nanowire Based Gas Sensor Platform

摘要

Over the past few decades, different types of gas sensors have been developed based on different sensing materials and methods. Among them, semiconducting metal oxide nanomaterials are suitable for gas sensing applications due to their high electron mobility, high surface-to-volume ratio, high crystallinity, and long-term stability. Considerable efforts have been made to improve the performance indicators of metal oxide gas sensors such as sensitivity, selectivity, reaction and recovery time. However, in recent years, there has been growing demand for miniaturization, low power consumption, low cost and mass production, which are the characteristics required for continuous and systematically integrated monitoring and management in the sensor market.