首页> 外国专利> INDIUM OXIDE NANOWIRE HAVING COPPER-BASED DOPANTS, METHOD OF FORMING THE SAME AND GAS SENSOR HAVING THE SAME, AND METHOD OF FORMING A PLURALITY OF NANOWIRES HAVING METAL PHTHALOCYANINE, NANOWIRE ARRANGEMENT AND GAS SENSOR HAVING THE PLURALITY OF METAL PHTHALOCYANINE NANOWIRES

INDIUM OXIDE NANOWIRE HAVING COPPER-BASED DOPANTS, METHOD OF FORMING THE SAME AND GAS SENSOR HAVING THE SAME, AND METHOD OF FORMING A PLURALITY OF NANOWIRES HAVING METAL PHTHALOCYANINE, NANOWIRE ARRANGEMENT AND GAS SENSOR HAVING THE PLURALITY OF METAL PHTHALOCYANINE NANOWIRES

机译:具有基于铜的掺杂剂的氧化铟纳米线,具有相同的形成方法和气体传感器以及具有多个金属酞菁的纳米线,具有纳米结构的纳米排列和具有多个金属邻苯二甲酸度的气体传感器的纳米氧化物

摘要

According to embodiments of the present invention, a method of forming an indium oxide nanowire including copper-based dopants is provided. The method includes providing an indium-based precursor material and a copper-based dopant precursor material, and performing a thermal evaporation process to vapourise the indium-based precursor material and the copper-based dopant precursor material to form an indium oxide nanowire comprising copper-based dopants on a substrate. According to further embodiments of the present invention, an indium oxide nanowire including copper-based dopants and a gas sensor are also provided. According to further embodiments of the present invention, a method of forming a plurality of nanowires including metal phthalocyanine, a nanowire arrangement and a gas sensor are also provided.
机译:根据本发明的实施方式,提供了一种形成包括铜基掺杂剂的氧化铟纳米线的方法。该方法包括提供铟基前驱物材料和铜基掺杂物前驱物材料,以及执行热蒸发工艺以汽化铟基前驱物材料和铜基掺杂物前驱物材料以形成包含铜-的氧化铟纳米线。衬底上的金属掺杂剂。根据本发明的其他实施方式,还提供了包括铜基掺杂剂的氧化铟纳米线和气体传感器。根据本发明的另外的实施方式,还提供了形成包括金属酞菁的多个纳米线的方法,纳米线布置和气体传感器。

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