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An Investigation on Secondary EFO Copper Wire - from a Nanoscale Perspective View

机译:次媒体铜线 - 从纳米级视角研究

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The aim of present research is to investigate the characteristic of secondary EFO (electronic flame-off) Pdcoated copper wire. The term of "secondary" is twice EFO performed by a bonding apparatus, K&S 1488 wire bonder. As a result, secondary EFO Cu wire demonstrates a longer heat affected zone (HAZ) and a softer free air ball (FAB) which results in a decrease in the squeeze of aluminum bond pad. It is also observed that the surface roughness is a major factor to reduce the aluminum pad squeezing. The interfacial coefficient of frictional force at a nanoscale surface level was measured by Atomic Force Microscopy (AFM). The coefficient of frictional force needs to measure both the normal force (corresponds to loading force-distance curve) and a lateral force (corresponds to friction force) on a sliding contact. In addition, mechanical property of FAB surface on Pd-coated copper wire was determined by nanoindenter. A well-defined contact area is measured to study the frictional force and friction stress. Thermal aging effect has been conducted to reduce the strength of Cu wire and increase the reliability. The study of roughness parameters corresponds to evaluate the friction and the interfacial strengths. Local variation in nano tribology is also measured. Nanotribology is crucial in describing manipulations of molecules behavior. The measured surface topography (3D profiles) are then applied to determinate the potential energy in molecular dynamic (MD) method to study the atomic scale frictional interactions. A series of experimental works and MD predictions are conducted to investigate the interfacial behavior along the Cu FAB and Al Pad. Keyword: secondary EFO, Pd-coated Copper wire, nanotribology, molecular dynamics.
机译:目前研究的目的是研究次级EFO(电子燃烧)PDCOACED铜线的特性。 “二次”术语是由粘合装置,K&S1488线粘合剂进行的两次EFO。结果,辅助EFO Cu线演示了更长的热影响区域(HAZ)和更柔软的空气球(Fab),其导致铝合金焊盘的挤压的减小。还观察到,表面粗糙度是减少铝焊盘挤压的主要因素。通过原子力显微镜(AFM)测量纳米级表面水平处的帧力的界面系数。摩擦力的系数需要测量正常力(对应于装载力 - 距离曲线)和滑动触头上的横向力(对应于摩擦力)。此外,通过纳米茚满的纳米丁基测定PD涂覆的铜线上Fab表面的机械性能。测量明确明确的接触区域以研究摩擦力和摩擦应力。已经进行了热老化效果以降低Cu线的强度并提高可靠性。粗糙度参数的研究对应于评估摩擦和界面强度。还测量了纳米摩擦学的局部变化。纳米纤维学在描述分子行为的操纵方面至关重要。然后施加测量的表面形貌(3D轮廓)以确定分子动态(MD)方法中的势能,以研究原子尺度摩擦相互作用。进行一系列实验工程和MD预测以研究沿Cu Fab和Al垫的界面行为。关键词:次级EFO,PD涂层铜线,纳米型,分子动力学。

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