Laminates for MEMS and BioMEMS

摘要

This paper describes a new way to build MEMS and BioMEMS devices using laminate technologies borrowed from the packaging industry. This approach to building MEMS departs from the traditional silicon approach, and offers many advantages, including the ability to design and build the package at the same time as the device itself. The use of MEMS fabrication techniques, combined with microelectronics manufacturing technology allows a host of integrated devices to be built using novel materials and processes. This frees the MEMS designer from the significant limitations imposed by silicon and its related materials and processes. Devices can be built that are intended for high power applications, optical applications, or biomedical applications.