Guest Editorial: Theory and Practice of MEMS/NEMS/MOEMS, RF MEMS, and BioMEMS

摘要

Researchers in the field of transducers and micronanotechnology have made tremendous strides during thenpast decade.Throughout this period of progress, the Asia-nPacific Conference on Transducers and Micro-Nano Tech-nnologies u0001APCOTu0002 has been one of the premier venuesnfor reporting on results in this field. In this special sectionnof the Journal of Micro/Nanolithography, MEMS, and MOEMSnu0001JM3nu0002, we are pleased to present selected papers from thenfourth APCOT conference held during June 2008 innTainan,Taiwan.