Special Section Guest Editorial: BioMEMS, Theory and Practice of MEMS/NEMS, and Sensors

摘要

Researchers in the theory, design, fabrication, and charac-nterization of MEMS/NEMS, bioMEMS, and nanotechnolo-ngies have been making tremendous progress in recentnyears. In this special section of the Journal of MicroNanolithography, MEMS, and MOEMS u0001JM3u0002,wearenpleased to present selected papers from the IEEE Interna-ntional Conference on Nano/Molecular Engineering & Medi-ncine u0001IEEE-NANOMEDu0002 held October 2009 in Taiwan.