Structural and Optical Properties of Pulse Laser Deposited TiO_2 Thin Films

摘要

TiO_2 thin films were prepared on quartz glasses by pulsed laser deposition (PLD) using a KrF laser excimer. The crystalline structure was characterized by X-ray diffraction, and the optical properties of the films were investigated using spectroscopic ellipsometry and UV-vis spectra respectively. The effects of the PLD conditions, including substrate temperature and O_2 pressure on the crystalline structure and the optical properties of the films were investigated. The results indicated that there are a suitable substrate temperature and an O_2 pressure which is favorable for the synthesis of anatase-type TiO_2.