Epitaxial growth of SrTiO3 film on MgO single crystal substrate

摘要

SrTiO3 films were prepared on (100) MgO single crystal substrate by laser chemical vapor deposition. With increasing deposition temperature from 1023 to 1203 K, the orientation of the SrTiO3 films changed from (111) to (100). (100)-oriented SrTiO3 films were epitaxially grown at temperature 1120–1203 K with in-plane orientation. (111)-oriented SrTiO3 films had a columnar structure with pyramidal caps, while (100)-oriented SrTiO3 films had a dense cross section, and rectangular-shaped texture was formed on the film surface. Deposition rate of (100)-oriented SrTiO3 films was 13 μm h~(?1).