The Impact Response Characteristics Research of the Multilayer Structure, Cantilever-type Electrothermal Actuator Based on MEMS

摘要

To study the impact response characteristics of multilayer structure, cantilever-type electrothermal actuators based on MEMS, a composite cantilever-beam model consisting of two layers of materials, SiO_2 and Al, is built. By using the engineer mechanics theory, the von mise stress under the impacts in the fuze system can be obtained. Meanwhile, the Finite Element Method (FEM) simulation is made to get the deformation displacement of the fixed end and the von mises stress distribution of the model. Besides, the natural frequency response is studied. The results present the actuator's response characteristics of impacts in the fuze system.