The use of laser printers for obtaining photomasks for the photolithography process

摘要

For several decades, microfluidics and related fields have been dynamically developing. For the implementation of structures with a size of several dozen micrometers instead of expensive chrome photomasks, in some cases patterns printed on a typical film by laser printers can be used. The work will compare chrome masks and masks made by laser printers. The structures obtained by the less expensive masks printed on the film will also be presented.