Analytical Modelling and FEM Simulation of Capacitive Pressure Sensor for Intraocular Pressure Sensing

摘要

The paper presents analytical modelling and Finite Element Method (FEM) based simulation of clamped circular capacitive pressure sensors for Intraocular Pressure (IOP) measurement. The parallel plate capacitive pressure sensor consists of a fixed backplate and a circular shaped clamped thin diaphragm made of silicon material. The plates are separated by a vacuum media. MATLAB~?and COVENTORWARE~?are used for analytical and FEM simulations, respectively, and a comparison of maximum deflection in the diaphragm, capacitance after pressure application and sensitivity is carried out. A pressure range of 0-60 mmHg is used for IOP measurement.