A simple, practical way to evaluate process-induced oxygen precipitates was investigated. Effective values of fastest nucleation point (T_C, J_(max)) were derived as parameters of precipitate densities from the as-grown oxygen precipitate nuclei distributions by fitting them into the cumulative function F(T) of the nucleation rate J = J(Oi, C_V, T). Precipitate densities were clearly explained by T_C and J_(max) in the entire Oi and point defect region. From the relations of Oi and Cv on the fastest nucleation point in the nucleation rate, T_C is closely related to the C_V and expected as a potential indicator of evaluating the practical CZ-Si manufacturing.
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