Effect of additive on surface properties of solution coated PZT ferroelectric film

摘要

In order to meet the requirements of large-scale industrial production, a hybrid sol-gel route which was used to fabricate PZT thick film attract a lot due to its low price. However, surface imperfections, such as crack, pore and thickness nonuniform must be controlled. In this work, in order to get perfect film additive such as formylamine, acetic acid, polyvinylpyrrolidone (PVP) were studied. The surface morphologies were characterized by the Dimension 3100 atomic force microscope (AFM) and the Quanta 400 FEG Field emission environmental scanning electron microscope (SEM) respectively. The effect of additives on film thickness was studied by the JA. Woollam MD2000D Elliptic polarization spectrometer. The results show us that the additive can improve the the defects such as crack, porous and thickness nonuniform of PZT films effectively. We got crack-free, nonporous and compact PZT piezoelectric films when the PZT sol was acetic acid 20%, formylamine 15% and PVP 1% inside.