Modeling and Simulation of the Silicon Micro-machined Gyroscope Mode-Coupling System

摘要

This paper focuses on the mode-coupling characteristics of gyroscope, and tries to rebuild a more perfect system model of silicon micro-machined gyroscope. It analyses the factors causing the coupling motions between drive-mode and detect-mode of gyroscope system. The mathematical model is deducted out based on the dynamic model and dynamic equations of gyroscope system. And the simulation resulted by MATLAB is in good agreement with the experiment results, which verifies the correctness of the mathematical model of silicon micro-machined gyroscope mode-coupling system.