A SILICON-BASED MICRO-MACHINED VIBRATORY GYROSCOPE WITH AN I-SHAPED STRUCTURE

摘要

The invention relates to a silicon-based micro-machined vibratory gyroscope with an I-shaped structure, which is a measuring instrument used for measuring the angular rate perpendicular to a base, and comprises a top monocrystalline silicon, a middle monocrystalline silicon, and a bottom monocrystalline silicon; the top monocrystalline silicon being arranged with signal input and output lines is the silicon micro gyroscope packaged cover plate; the middle monocrystalline silicon is where the gyroscope mechanical structures are fabricated; the bottom monocrystalline silicon is a gyroscope substrate with fixed pedestals; the middle monocrystalline silicon layer is sealed in a closed cavity formed by top and bottom monocrystalline silicon layers. The invented gyroscope has properties of small error, high mechanical sensitivity, low vibration sensitivity, and low temperature sensitivity, and can implement motion decoupling of a driving mode and a detection mode, large amplitude vibration, and detection output decoupling.