THREE MOIRE TECHNIQUES UNDER A LASER SCANNING MICROSCOPE FOR MICRON/SUBMICRON-SCALE DEFORMATION MEASUREMENT

摘要

Three moire techniques based on a laser scanning microscope (LSM) were presented and compared for the first time, including the LSM scanning moire method, our developed LSM overlapping moire method, and our newly developed LSM secondary moire method. The formation principles of these moire patterns and the measurement principles for deformation measurement were introduced. The applicable conditions of these three techniques were analyzed. Some typical moire fringes on a strain gauge, carbon fiber reinforce plastics, a polyimide film and a silicon wafer were illustrated. Our developed LSM overlapping moire method and secondary moire method are effective in eliminating the scanning distortion of the LSM. These three kinds of moire techniques are able to expand the application range of the LSM in deformation measurement at the micron and the submicron scales.