Moire Techniques Based on Memory Function of Laser Scanning Microscope for Deformation Measurement at Micron/Submicron Scales

摘要

This paper presents two up-to-date moire techniques for deformation measurement based on the memory function of a laser scanning microscope (LSM). The two techniques are the LSM overlapping moire method and the LSM secondary moire method. The formation principles and the measurement principles of these two methods are presented and compared to those of the traditional scanning moire method for the first time. The applicable conditions and characteristics of these three moire techniques are analyzed. Some typical moire fringes on a strain gauge, carbon fiber reinforced plastics, a polyimide film, and a silicon wafer are illustrated. Our proposed LSM overlapping moire method and LSM secondary moire method are able to expand the application range of the LSM in deformation measurement to the micron and the sub-micron scales.