Deposition and characterization of boron doped ZnO thin films by ultrasonic spray pyrolysis method

摘要

Boron doped ZnO (BZO) thin films were deposited on glass substrate by ultrasonic spray pyrolysis method using zinc acetylacetonate and boric acid. The structural, morphological, optical and electrical properties of BZO thin films under various doping level of boron and substrate temperature were investigated. The results show that zinc acetylacetonate is helpful to deposit BZO thin films at low temperature. The morphology of grains at low and high substrate temperature is circular and flake-like. The preferred orientation along (101) plane is obvious at 360 °C. The doping level and substrate temperature have remarkable influence on sheet resistance, but little impact on visible transmittance. The optimal sheet resistance of 173 ?/sq and average visible transmittance of above 80% can be achieved at doping level of 5 at% and'growth temperature of 340 °C.