Structural Design for Microaccelerometer

摘要

An optimal method is proposed for designing the structure parameters of microaccelerometer. Four types of microaccelerometers are investigated including piezoresistive cantilever-type, piezoresistive bridge-type, capacitive cantilever-type and capacitive bridge-type. The objective is to enlarge sensitivity as well as bandwidth. The effect of structure parameters such as length, width and depth on sensitivity are studied by forward analysis. According to the results of forward analysis the nonlinear optimization to maximize sensitivity and meet the requirement of bandwidth is efficiently performed. A numerical example to demonstrate the optimal design of microaccelerometers using the proposed method is presented.