Synthesis and Characterization of Plasma Polymerized Thin Films Deposited From Benzene and Hexamethyldisiloxane Using(PECVD) Method

摘要

Polymer-like organic thin films were deposited on both Al and glass at RT by PECVD method using benzene and hexamethyldisiloxane (HMDSO). The surface and physical properties of plasma-polymerized organic thin films were investigated at different r.f. powers. The effects of benzene/argon ratio on the properties of plasma polymerized benzene films were also investigated. It is found that using benzene alone results in a non-coherent and non-adherent powdery deposited material. The chemical structure and surface properties of the as-grown plasma polymerized thin films were analyzed on glass substrates with FTIR and contact angle measurements. The corrosion resistance of Al alloy both bare and covered with plasma polymerized films was carried out by potentiodynamic polarization measurements in standard 3.5 wt. % NaCl solution at RT. Surface roughness of films deposited on Al alloy was investigated using SEM. Studying the above parameters indicate that the films produced are suitable for specific practical applications.