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Reliability of carbon nanotube bumps for chip on glass application

机译:玻璃应用芯片碳纳米管凸块的可靠性

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Carbon nanotubes (CNTs) are an ideal candidate material for electronic interconnects due to their extraordinary thermal, electrical and mechanical properties. In this study, densified CNT bumps utilizing the paper-mediated controlled method were applied as the interconnection for chip on glass (COG) applications, and the silicon chip with patterned CNT bumps was then flipped and bonded onto a glass substrate using anisotropic conductive adhesive (ACA) at a bonding pressure of 127.4 Mpa, 170°C for 8 seconds. The electrical properties of the COG were evaluated with the contact resistance of each bump measured using the four-point probe method. Three different structure traces, marked as Trace A, Trace B, and Trace C, were tested, respectively. Thermal cycling (-40 to 85°C, 800 cycles) and damp heat tests (85°C/85% RH, 1000 hours) were also conducted to evaluate the reliability of the CNT-COG structure. The average contact resistance of the samples was recorded during these tests, in which there was no obvious electrical failure observed after both the thermal cycling and damp heat tests. The results of these tests indicated that the COG has good reliability and the CNT bumps have promising potential applications in COG.
机译:由于其非凡的热,电气和机械性能,碳纳米管(CNT)是用于电子互连的理想候选材料。在该研究中,利用纸张介导的控制方法的致密化CNT凸块作为玻璃(COG)应用的芯片互连,然后使用各向异性导电粘合剂将具有图案化CNT凸块的硅芯片翻转并粘合到玻璃基板上( ACA)在127.4MPa,170℃的粘合压力下8秒。通过使用四点探针方法测量的每个凸块的接触电阻评估COG的电性能。分别测试了三种不同的结构迹线,标记为迹线A,痕迹B和痕量C.还进行了热循环(-40至85°C,800次循环)和潮湿的热试验(85℃/ 85%RH,1000小时)以评估CNT-COG结构的可靠性。在这些测试期间记录样品的平均接触电阻,在热循环和潮湿的热试验后没有观察到明显的电气故障。这些测试的结果表明,COG具有良好的可靠性,CNT凹凸具有很有希望的COG潜在应用。

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