Preparation of p-type Hydrogenated Nanocrystalline Cubic Silicon Carbide / n-type Crystalline Silicon Heterojunction Solar Cells by VHF-PECVD

摘要

Aluminum doped p-type hydrogenated nanocrystalline cubic silicon carbide (Al-doped p-nc-3C-SiC:H) thin films were successfully deposited by very high frequency plasma enhanced chemical vapor deposition (VHF-PECVD) on n-type c-Si (n-c-Si) without serious damage by inserting an a-Si_(1-x)C_x:H buffer layer at p-nc-3C-SiC:H/n-c-Si interface as a protective layer against atomic hydrogen etching and a passivation layer. As a result, an active area efficiency of 17.0 % has been achieved without texturing [V_(oc)=0.648 V, J_(sc)=35.9 mA/cm~2, FF=0.732].