Design of the temperature signal wireless receiver and display system on polishing interface in chemical mechanical polishing

摘要

In this paper, the temperature signal wireless receiver and display system has been described online based on the microcontroller in chemical mechanical polishing. The system uses a low-power and high-performance AT89S52 microcontroller and a wireless transceiver module nRF24L01 to receive data. Then, the temperature is displayed through the five digitals. Besides the temperature on the polished interface in processing region can be observed online. The system presented here can provide some references for investigating the influence of the polishing interface temperature on chemical mechanical polishing process.