首页> 外文OA文献 >Design Of The Temperature Signal Wireless Receiver And Display System On Polishing Interface In Chemical Mechanical Polishing

【2h】

Design Of The Temperature Signal Wireless Receiver And Display System On Polishing Interface In Chemical Mechanical Polishing

机译：化学机械抛光中抛光接口温度信号无线接收与显示系统的设计

代理获取

本网站仅为用户提供外文OA文献查询和代理获取服务，本网站没有原文。下单后我们将采用程序或人工为您竭诚获取高质量的原文，但由于OA文献来源多样且变更频繁，仍可能出现获取不到、文献不完整或与标题不符等情况，如果获取不到我们将提供退款服务。请知悉。

页面导航

著录项
引文网络
相似文献
相关主题

著录项

作者
Hong Gao; Jianxiu Su;
展开▼
作者单位

展开▼
年度 2011
总页数
原文格式 PDF
正文语种
中图分类

相似文献

外文文献
中文文献
专利

1. First-principles molecular dynamics investigation of ceria/silica sliding interface toward functional materials design for chemical mechanical polishing process [J] . Onodera Tasuku, Takahashi Hitomi, Nomura Satoyuki Applied Surface Science . 2020,第Nova15期

机译：第一原理分子动力学研究Ceria /二氧化硅滑动界面对化学机械抛光过程的功能材料设计
2. Effects of conditioning temperature on polishing pad for oxide chemical mechanical polishing process [J] . Nam-Hoon Kim, Gwon-Woo Choi, Jin-Seong Park, Microelectronic Engineering . 2005,第3a4期

机译：调节温度对氧化物化学机械抛光工艺抛光垫的影响
3. Synergistic integrated design of an electrochemical mechanical polishing end-effector for robotic polishing applications [J] . Mohammad Abd El Khalick, Hong Jie, Wang Danwei, Robotics and Computer Integrated Manufacturing . 2019,第FEBa期

机译：用于机器人抛光应用的电化学机械抛光末端执行器的协同集成设计
4. Design of the temperature signal wireless receiver and display system on polishing interface in chemical mechanical polishing [C] . Gao Hong, Su Jianxiu International Conference on Advances in Engineering . 2013

机译：化学机械抛光抛光界面温度信号无线接收机和显示系统的设计
5. Mechanical interactions at the interface of chemical mechanical polishing. [D] . Shan, Lei. 2000

机译：化学机械抛光界面处的机械相互作用。
6. Effect of chemical mechanical polishing on surface nature of titanium implants FT-IR and wettability data of titanium implants surface after chemical mechanical polishing implementation [O] . Zeynep Ozdemir, Gul Bahar Basim 2017

机译：化学机械抛光实施后化学机械抛光对钛植入物表面性质的影响FT-IR和钛植入物表面的润湿性数据
7. Axiomatic system design : chemical mechanical polishing machine case study [O] . Melvin Jason W. (Jason Webley) 2003

机译：公理系统设计：化学机械抛光机案例研究

Design Of The Temperature Signal Wireless Receiver And Display System On Polishing Interface In Chemical Mechanical Polishing

著录项

引文网络

相似文献

相关主题

期刊订阅