A new approach for fabricating polymer lenses is presented in this paper. The lenses are fabricated by filling circular holes in a Si wafer with an UV cured adhesive. The free surface of the glue performs initially a liquid lens due to the surface tension. This shape is then preserved by curing with UV-hardening light. The backside of the lenses is polished and afterwards, the lenses are released from the wafer, which is serving as a frame. The Si wafer has a thickness of about 500 um and the holes are etched applying Deep Reactive Ion Etching (DRIE) through the wafer. Therefore, a layer of the positive photoresist AZ?9260 is spin coated onto the wafer. After a prebake, circular structures with a diameter of 2 mm are fabricated by photolithography. The structured photoresist serves as an etching mask for the DRIE. After the etching step the photoresist is stripped.
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