Fabrication of ZnO Bridging Nanowire Device by a Single-Step Chemical Vapor Deposition Method

摘要

ZnO nanowires are directly integrated into a working device by a single-step chemical vapor deposition (CVD) method. Gold catalyst is patterned on a quartz glass substrate using a comb-shaped shadow mask and then ZnO is grown on the patterned substrate by CVD. Thick ZnO layers formed on the gold-patterned areas serve as native electrodes. Ultra-long (～100μm) ZnO nanowires grown across the gap between the ZnO electrodes and the nanowires serve as the sensing elements of the device. The device exhibits high sensitivity and fast response to UV illumination in air. Our method can be used to fabricate other metal oxide semiconductor bridging nanowire devices, which have promising applications in photodetection and gas sensing.